Leo V. Klos
Varian Semiconductor
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Publication
Featured researches published by Leo V. Klos.
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on | 2002
Joseph C. Olson; Peter E. Maciejowski; Shengwu Chang; Leo V. Klos
Indirectly heated cathode ion sources have been developed for the VIISta 3000 and 810HP series ion implanters. The sources greatly increase lifetime and maintain or improve beam current output for all species and charge states. The sources are designed with common consumables. Source lifetime, beam current, stability, and tuning data are presented.
Archive | 2002
Peter E. Maciejowski; Joseph C. Olson; Shengwu Chang; Bjorn O. Pedersen; Leo V. Klos; Daniel Distaso; Curt D. Bergeron
Archive | 2001
Joseph C. Olson; Leo V. Klos; Anthony Renau; Nicholas A. Venuto
Archive | 2000
Antonella Cucchetti; Leo V. Klos; Joseph C. Olson; Raymond L. Pelletier; Keith Pierce; Anthony Renau; Donna L. Smatlak
Archive | 2006
Eric R. Cobb; Russell J. Low; Craig R. Chaney; Leo V. Klos
Archive | 2005
Russell J. Low; Eric R. Cobb; Joseph C. Olson; Leo V. Klos
Archive | 2001
James Botelho; Leo V. Klos
Archive | 2009
Neil J. Bassom; Leo V. Klos; Joseph C. Olson
Archive | 2000
Antonella Cucchetti; Leo V. Klos; Joseph C. Olson; Raymond L. Pelletier; Keith Pierce; Anthony Renau; Donna L. Smatlak
Archive | 2011
Craig R. Chaney; Leo V. Klos; Anthony Renau; Alexander S. Perel
