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Leonard J. Sharpless

Lam Research

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Publication

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Archive | 2007

Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components

Ian J. Kenworthy; Kelly W. Fong; Leonard J. Sharpless

Archive | 2003

Capacitive manometer having reduced process drift

Leonard J. Sharpless; Neil Benjamin; Jeffrey W. Fish

Archive | 2004

Methods and apparatus for optimal temperature control in a plasma processing system

Miguel A. Saldana; Leonard J. Sharpless; John Daugherty

Archive | 2013

Movable chamber liner plasma confinement screen combination for plasma processing apparatuses

Danny Brown; Leonard J. Sharpless

Archive | 2004

Apparatus for an optimized plasma chamber top piece

Leonard J. Sharpless; Keith Comendant

Archive | 2007

Apparatus for shielding process chamber port having dual zone and optical access features

Fangli J. Hao; Leonard J. Sharpless; Harmeet Singh

Archive | 2010

Coating method for gas delivery system

Ian J. Kenworthy; Duane Outka; Fangli Hao; Leonard J. Sharpless; Yijun Du

Archive | 2010

REPLACEABLE UPPER CHAMBER SECTION OF PLASMA PROCESSING APPARATUS

Leonard J. Sharpless; Harmeet Singh; Michael S. Kang

Archive | 2006

Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical access

Jeff Bogart; Leonard J. Sharpless; Harmeet Singh

Archive | 2015

Plasma Processing Devices Having Multi-Port Valve Assemblies

Michael C. Kellogg; Daniel Arthur Brown; Leonard J. Sharpless; Allan Ronne

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Harmeet Singh

Lam Research

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Ian J. Kenworthy

Lam Research

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Allan Ronne

Lam Research

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Danny Brown

Lam Research

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Jeff Bogart

Lam Research

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John Daugherty

Lam Research

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Keith Comendant

Lam Research

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Kelly W. Fong

Lam Research

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Michael S. Kang

Lam Research

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Arthur Sato

Lam Research

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