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Ian J. Kenworthy

Lam Research

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Publication

Featured researches published by Ian J. Kenworthy.

Archive | 2013

Gas distribution showerhead for inductively coupled plasma etch reactor

Michael Kang; Alex Paterson; Ian J. Kenworthy

Archive | 2010

Replaceable upper chamber parts of plasma processing apparatus

Daniel Arthur Brown; Jeffrey A. Bogart; Ian J. Kenworthy

Archive | 2007

Aluminum-plated components of semiconductor material processing apparatuses and methods of manufacturing the components

Ian J. Kenworthy; Kelly W. Fong; Leonard J. Sharpless

Archive | 2009

Edge rings for electrostatic chucks

Ian J. Kenworthy; Kelly W. Fong; Michael C. Kellogg

Archive | 2010

Coating method for gas delivery system

Ian J. Kenworthy; Duane Outka; Fangli Hao; Leonard J. Sharpless; Yijun Du

Archive | 2012

Compression member for use in showerhead electrode assembly

Darrell Ehrlich; Daniel Arthur Brown; Ian J. Kenworthy

Archive | 2016

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF DELIVERY

Daniel Arthur Brown; John Patrick Holland; Michael C. Kellogg; James E. Tappan; Jerrel K. Antolik; Ian J. Kenworthy; Theo Panagopoulos; Zhigang Chen

Archive | 2012

Aluminum-plated components of semiconductor material and methods of manufacturing the components

Ian J. Kenworthy; Kelly W. Fong; Leonard J. Sharpless

Archive | 2013

Replaceable upper chamber part of plasma reaction chamber

Daniel Arthur Brown; Jeff A Bogart; Ian J. Kenworthy

Archive | 2012

ACOUSTIC ENERGY UTILIZATION IN PLASMA PROCESSING

Ian J. Kenworthy; Daniel Arthur Brown; Cliff E. La Croix; Josh A. Cormier

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Daniel Arthur Brown

Lam Research

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Kelly W. Fong

Lam Research

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Leonard J. Sharpless

Lam Research

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Michael C. Kellogg

Lam Research

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Alex Paterson

Lam Research

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Darrell Ehrlich

Lam Research

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Duane Outka

Lam Research

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Fangli Hao

Lam Research

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James E. Tappan

Lam Research

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Jeffrey A. Bogart

Lam Research

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