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Francimar Campana

Applied Materials

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Publication

Featured researches published by Francimar Campana.

Archive | 2003

Method of depositing low dielectric constant silicon carbide layers

Francimar Campana; Srinivas D. Nemani; Michael Chapin; Shankar Venkataraman

Archive | 1998

Two-step borophosphosilicate glass deposition process and related devices and apparatus

Li-Qun Xia; Ellie Yieh; Maria Galiano; Francimar Campana; Shankar Chandran

Archive | 1999

Method of reducing undesired etching of insulation due to elevated boron concentrations

Li-Qun Xia; Francimar Campana; Ellie Yieh

Archive | 2003

Method and apparatus for processing semiconductor substrates with hydroxyl radicals

Himanshu Pokharna; Shankar Chandran; Srinivas D. Nemani; Chen-An Chen; Francimar Campana; Ellie Yieh; Li-Qun Xia

Archive | 1999

Method for depositing and planarizing fluorinated BPSG films

Li-Qun Xia; Francimar Campana; Ellie Yieh

Archive | 1996

Method and apparatus for forming a dielectric film using helium as a carrier gas

Ellie Yieh; Paul Edward Gee; Li-Qun Xia; Francimar Campana; Shankar Venkataranan; Dana Tribula; Bang Nguyen

Archive | 1997

Throttle valve providing enhanced cleaning

Won B. Bang; Matthew W. Losey; Francimar Campana; Srinivas D. Nemani; Sundar Pichai

Archive | 1998

Throttle valve providing cleaning

Matthew W. Losey; Won B. Bang; Francimar Campana; Srinivas D. Nemani; Sundar Pichai

Archive | 2001

Two-step flourinated-borophosophosilicate glass deposition process

Francimar Campana; Li-Qun Xia; Ellie Yieh

Archive | 2000

An improved method for depositing and planarizing fluorinated BPSG films

Francimar Campana; Li-Qun Xia; Ellie Yieh

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Collaboration

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Ellie Yieh

Applied Materials

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Li-Qun Xia

Applied Materials

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Srinivas D. Nemani

Applied Materials

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Shankar Chandran

Applied Materials

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Chen-An Chen

Applied Materials

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Matthew W. Losey

Applied Materials

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Paul Edward Gee

Applied Materials

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Sundar Pichai

Applied Materials

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Won B. Bang

Applied Materials

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Bang Nguyen

Applied Materials

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