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Richard Wallingford

KLA-Tencor

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Publication

Featured researches published by Richard Wallingford.

Archive | 2007

SEMICONDUCTOR DEVICE PROPERTY EXTRACTION, GENERATION, VISUALIZATION, AND MONITORING METHODS

Ashok Kulkarni; Chien-Huei Chen; Cecelia Campochiaro; Richard Wallingford; Yong Zhang; Brian Duffy

Archive | 2011

Detecting defects on a wafer

Junqing Huang; Yong Zhang; Stephanie Chen; Tao Luo; Lisheng Gao; Richard Wallingford

Archive | 2008

Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer

Kris Bhaskar; Mark A. McCord; Santosh Bhattacharyya; Ardis Liang; Richard Wallingford; Hubert Altendorfer; Kais Maayah

Archive | 2010

Systems and methods for detecting defects on a wafer

Lu Chen; Jason Kirkwood; Mohan Mahadevan; James A. Smith; Lisheng Gao; Junqing Huang; Tao Luo; Richard Wallingford

Archive | 2008

Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection system

Richard Wallingford; Stephanie Chen; Jason Kirkwood; Tao Luo; Yong Zhang; Lisheng Gao

Archive | 2007

Methods for identifying array areas in dies formed on a wafer and methods for setting up such methods

Chien-Huei Adam Chen; Ajay Gupta; Richard Wallingford; Kaustubh Kaust Namjoshi; Mike Van Riet; Michael Cook

Archive | 2004

Daisy chained topology

Krishnamurthy Bhaskar; Mark J. Roulo; John S. Taylor; Lawrence R. Miller; Paul T. Russell; Jason Z. Lin; Eliezer Rosengaus; Richard Wallingford; Kishore Bubna

Archive | 2004

Full swath analysis

Krishnamurthy Bhaskar; Mark J. Roulo; John S. Taylor; Lawrence R. Miller; Paul T. Russell; Jason Z. Lin; Eliezer Rosengaus; Richard Wallingford; Kishore Bubna

Archive | 2006

Programmable Image Computer

Krishnamurthy Bhaskar; Mark J. Roulo; John S. Taylor; Lawrence R. Miller; Paul T. Russell; Jason Z. Lin; Eliezer Rosengaus; Richard Wallingford; Kishore Bubna

Archive | 2013

Apparatus and methods for finding a best aperture and mode to enhance defect detection

Pavel Kolchin; Richard Wallingford; Lisheng Gao; Grace H. Chen; Markus b. Huber; Robert M. Danen

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Jason Z. Lin

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Lisheng Gao

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Eliezer Rosengaus

KLA-Tencor

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John S. Taylor

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Kishore Bubna

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Krishnamurthy Bhaskar

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Lawrence R. Miller

KLA-Tencor

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Mark J. Roulo

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Paul T. Russell

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Tao Luo

KLA-Tencor

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