Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Lutz Markus is active.

Publication


Featured researches published by Lutz Markus.


Archive | 2001

Mikromechanisches Bauelement und entsprechendes Herstellungverfahren

Lutz Markus


Archive | 2004

PRESSURE SENSOR DEVICE AND ITS MANUFACTURING METHOD

Lutz Markus; Partridge Aaron


Archive | 2004

ELECTROMECHANICAL SYSTEM HAVING CONTROLLED ATMOSPHERE. AND METHOD OF MANUFACTURING SAME

Lutz Markus; Partridge Aaron; Kronmueller Silvia


Archive | 2011

Frequency and/or phase compensated microelectromechanical oscillator and related method

Partridge Aaron; Lutz Markus


Archive | 2003

Process for connecting a silicon plate to a further plate comprises directing a laser beam onto the further plate through the silicon plate

Reichenbach Frank; Fischer Frank; Hausner Ralf; Haag Frieder; Graf Eckhard; Lutz Markus


Archive | 2007

Herstellungsverfahren für mikromechanisches Bauelement

Offenberg Michael; Bischof Udo; Lutz Markus


Archive | 2007

Beschleunigungssensor und Verfahren zur Herstellung eines Beschleunigungssensors

Muenzel Horst; Schubert Dietrich; Boehringer Alexandra; Offenberg Michael; Heyers Klaus; Lutz Markus


Archive | 2004

METHOD FOR RELEASING SURFACE MICROMACHINED STRUCTURE IN EPITAXIAL REACTOR

Lutz Markus; Partridge Aaron


Archive | 2001

Manufacturing micromechanical component, involves providing sensor structure with trenches of width not greater than determined maximum width closable by closure layer bulges

Lutz Markus


Archive | 2000

Mikromechanische federstruktur, insbesondere für einen drehratensensor

Kipp Andreas; Hauer Joerg; Goetz Siegbert; Lutz Markus

Researchain Logo
Decentralizing Knowledge