Is this you? Create Your Porfile
Avatar

Lyle D. Breiner

Micron Technology

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Lyle D. Breiner is active.

Explore More

Publication

Featured researches published by Lyle D. Breiner.

Archive | 2001

Method for efficient manufacturing of integrated circuits

Lyle D. Breiner; Randhir P. S. Thakur

Archive | 2001

Atomic layer deposition of capacitor dielectric

Lingyi A. Zheng; Er-Xuan Ping; Lyle D. Breiner; Trung T. Doan

Archive | 1995

Method to form hemi-spherical grain (HSG) silicon from amorphous silicon

Randhir P. S. Thakur; Lyle D. Breiner

Archive | 1997

Method to form hemi-spherical grain (HSG) silicon

Randhir P. S. Thakur; Lyle D. Breiner

Archive | 2003

Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces

Lingyi A. Zheng; Trung T. Doan; Lyle D. Breiner; Er-Xuan Ping; Kevin L. Beaman; Ronald A. Weimer; David J. Kubista; Cem Basceri

Archive | 2003

Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces

Cem Basceri; Trung T. Doan; Ronald A. Weimer; Kevin L. Beaman; Lyle D. Breiner; Lingyi A. Zheng; Er-Xuan Ping; Demetrius Sarigiannis; David J. Kubista

Archive | 2003

Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers

Kevin L. Beaman; Ronald A. Weimer; Lyle D. Breiner; Er-Xuan Ping; Trung T. Doan; Cem Basceri; David J. Kubista; Lingyi A. Zheng

Archive | 2003

Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers

David J. Kubista; Trung T. Doan; Lyle D. Breiner; Ronald A. Weimer; Kevin L. Beaman; Er-Xuan Ping; Lingyi A. Zheng; Cem Basceri

Archive | 2004

Apparatuses for treating pluralities of discrete semiconductor substrates; and methods for treating pluralities of discrete semiconductor substrates

Trung Tri Dean; Lyle D. Breiner; Er-Xuan Ping; Lingyi A. Zheng

Archive | 2003

Methods for treating pluralities of discrete semiconductor substrates

Trung T. Doan; Lyle D. Breiner; Er-Xuan Ping; Lingyi A. Zheng

Explore More

Collaboration

Dive into the Lyle D. Breiner's collaboration.

Top Co-Authors
Avatar

Er-Xuan Ping

Micron Technology

View shared research outputs
Top Co-Authors
Avatar

Trung T. Doan

Micron Technology

View shared research outputs
Top Co-Authors
Avatar

Lingyi A. Zheng

Micron Technology

View shared research outputs
Top Co-Authors
Avatar

Ronald A. Weimer

Micron Technology

View shared research outputs
Top Co-Authors
Avatar

David J. Kubista

Micron Technology

View shared research outputs
Top Co-Authors
Avatar

Cem Basceri

Micron Technology

View shared research outputs
Top Co-Authors
Avatar

Kevin L. Beaman

Micron Technology

View shared research outputs
Top Co-Authors
Avatar

Guy T. Blalock

Micron Technology

View shared research outputs
Top Co-Authors
Avatar

Shenlin Chen

Micron Technology

View shared research outputs
Top Co-Authors
Avatar

Randhir P. S. Thakur

Micron Technology

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge