Is this you? Create Your Porfile
Avatar

Makiko Katano

Toshiba

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Makiko Katano is active.

Explore More

Publication

Featured researches published by Makiko Katano.

Archive | 1998

Method of maintaining cleanliness of substrates and box for accommodating substrates

Ayako Mizuno; Makiko Katano; Katsuya Okumura

Archive | 2007

Local clean robot-transport plant and robot-transport manufacturing method

Atsuko Kawasaki; Masahiro Kiyotoshi; Shoko Ito; Makiko Katano; Ayako Mizuno

Archive | 2007

Immersion Lithography Apparatus and Exposure Method

Makiko Katano; Takuya Kono; Ayako Mizuno

Archive | 2011

MASK CLEANING METHOD, MASK CLEANING APPARATUS, AND PELLICLE

Eri Uemura; Makiko Katano; Yuji Yamada

Archive | 2011

SAMPLE CONTAMINATION METHOD

Yuji Yamada; Makiko Katano; Ayako Mizuno; Eri Uemura; Asuka Uchinuno; Chikashi Takeuchi

Archive | 2007

Exposure apparatus and semiconductor device manufacturing method

Makiko Katano; Takuya Kono

Archive | 2016

Analytical apparatus, sample holder and analytical method

Haruko Akutsu; Makiko Katano; Akira Kuramoto

Archive | 2013

CLEANLINESS MEASURING CARRIAGE AND CLEANLINESS MEASURING SYSTEM

Eri Uemura; Makiko Katano; Tsunekazu Yasutake

Archive | 2012

Impurity analysis device and method

Yuji Yamada; Makiko Katano; Chikashi Takeuchi; Tomoyo Naito

Archive | 2011

SEMICONDUCTOR DEVICE FABRICATION MASK AND METHOD OF MANUFACTURING THE SAME

Kyo Otsubo; Makiko Katano; Haruko Akutsu; Ayako Mizuno

Explore More

Collaboration

Dive into the Makiko Katano's collaboration.

Top Co-Authors
Avatar

Ayako Mizuno

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Eri Uemura

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Haruko Akutsu

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Kyo Otsubo

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Takuya Kono

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Yuji Yamada

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Akira Kuramoto

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Atsuko Kawasaki

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Katsuya Okumura

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Masahiro Kiyotoshi

Toshiba

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge