Manuel Potéreau

On-Wafer Characterization of Silicon Transistors Up To 500 GHz and Analysis of Measurement Discontinuities Between the Frequency Bands

This paper investigates on-wafer characterization of SiGe HBTs up to 500 GHz. Test structures for on-wafer thru-reflect-line (TRL) calibration have been designed and are presented. The TRL calibration method with silicon standards has first been benchmarked through electromagnetic simulation. Passive and active components are then characterized up to 500 GHz. The slight discontinuities between the frequency bands are explored. A specific focus was placed on incorrect horizontal probe positioning as well as on probe deformation, resulting in a better assessment of possible measurement errors.

A test structure set for on-wafer 3D-TRL calibration

This paper presents a new test structure set for on-wafer 3D-TRL calibration. It permits to define the reference plane below the Back-End-of-Line on Metal 1 level. Only one additional test structure is necessary to account for the coupling between input and output ports. Measurement accuracy below 1fF has been achieved.

On the development of a novel high VSWR programmable impedance tuner

Impedance tuners are key instruments used for load- and source–pull measurements. They are crucial for any active microwave components, circuits, and systems characterization and optimization. This paper reports theoretical, simulated, and experimental results related to the development of a novel programmable impedance tuner offering high-voltage standing wave ratio (VSWR). After presenting the proposed tuner principle, a fabricated prototype operating at microwave frequencies and based on a 3.5 mm coaxial line is introduced with experimental results. Depending on the targeted frequency band, different pairs of slugs, with optimized length and characteristic impedance, can be used to obtain an optimal VSWR. This first prototype allowed us to demonstrate the interest of the proposed impedance synthesis principle and to identify ways forward to further improve its performances and push forward this promising technology.