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Martin S. Wohlert

Applied Materials

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Publication

Featured researches published by Martin S. Wohlert.

Archive | 2004

Retaining ring with shaped surface

Hung Chih Chen; Steven M. Zuniga; Charles C. Garretson; Douglas R. Mcallister; Jian Lin; Stacy Meyer; Sidney P. Huey; Jeonghoon Oh; Trung T. Doan; Jeffrey Schmidt; Martin S. Wohlert; Kerry F. Hughes; James C. Wang; Daniel Cam Toan Lu; Romain Beau De Lamenie; Venkata R. Balagani; Aden Martin Allen; Michael Jon Fong

Archive | 2005

Conductive pad with high abrasion

Yongqi Hu; Stan D. Tsai; Martin S. Wohlert; Feng Q. Liu; Liang-Yuh Chen

Archive | 2004

Composite pad assembly for electrochemical mechanical processing (ECMP)

Yongqi Hu; Stan D. Tsai; Feng Q. Liu; Liang-Yuh Chen; Ralph M. Wadensweiler; Paul D. Butterfield; Donald J. K. Olgado; Martin S. Wohlert; Sen-Hou Ko; Shou-sung Chang

Archive | 2006

Metal cmp process on one or more polishing stations using slurries with oxidizers

Shi-Ping Wang; Martin S. Wohlert; Alain Duboust; Renhe Jia; Feng Q. Liu; Yuan A. Tian; Liang-Yuh Chen; Stan D. Tsai; Wei-Yung Hsu

Archive | 2005

Method and apparatus for reduced wear polishing pad conditioning

Yan Wang; Stan D. Tsai; Yongqi Hu; Feng Q. Liu; Liang-Yuh Chen; Daxin Mao; Huyen Karen Tran; Martin S. Wohlert; Renhe Jia; Yuan A. Tian

Archive | 2005

Conditioning element for electrochemical mechanical processing

Yuan A. Tian; Alpay Yilmaz; Gerald John Alonzo; Martin S. Wohlert; Yongqi Hu; Stan D. Tsai; Robert A. Ewald; Shou-sung Chang

Archive | 2014

METHOD OF OUTGASSING A MASK MATERIAL DEPOSITED OVER A WORKPIECE IN A PROCESS TOOL

Prabhat Kumar; Wei-Sheng Lei; Martin S. Wohlert; James S. Papanu; Brad Eaton; Ajay Kumar

Archive | 2006

METHOD AND COMPOSITION FOR ELECTROCHEMICALLY POLISHING A CONDUCTIVE MATERIAL ON A SUBSTRATE

Huyen Karen Tran; Renhe Jia; You Wang; Stan D. Tsai; Martin S. Wohlert; Daxin Mao

Archive | 2011

APPARATUS AND METHOD FOR SOLAR CELL MODULE EDGE COOLING DURING LAMINATION

Robert C. Linke; Martin S. Wohlert; Adam Brand; Ofer Amir

Archive | 2009

Integrated Edge Clamping Mechanism for Processing of Laminates

Martin S. Wohlert; Pierluigi Lo-Menzo; Nicolas Barrois

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Collaboration

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Aden Martin Allen

Applied Materials

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Charles C. Garretson

Applied Materials

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Douglas R. Mcallister

Applied Materials

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Hung Chih Chen

Applied Materials

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James C. Wang

Applied Materials

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Jeffrey Schmidt

Applied Materials

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Jeonghoon Oh

Applied Materials

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Jian Lin

Applied Materials

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Kerry F. Hughes

Applied Materials

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Michael Jon Fong

Applied Materials

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