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Masahisa Watanabe

Tokyo Electron

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Publication

Featured researches published by Masahisa Watanabe.

Archive | 2011

Trench embedding method and film-forming apparatus

Masahisa Watanabe; Mitsuhiro Okada

Archive | 2011

TRENCH-FILLING METHOD AND FILM-FORMING SYSTEM

Masahisa Watanabe; Kazuhide Hasebe

Archive | 2011

METHOD FOR FILLING TRENCH AND FILM-DEPOSITION SYSTEM

Kazuhide Hasebe; Masahisa Watanabe; 将久 渡邊; 一秀 長谷部

Archive | 2004

Method and apparatus for processing polysilazane film

Shingo Hishiya; Kimiya Aoki; Masahisa Watanabe

Archive | 2013

TRENCH FILLING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

Masahisa Watanabe

Archive | 2006

Heat treatment method, heat treatment equipment, and storage medium

Tetsuya Shibata; Masahisa Watanabe; 哲弥 柴田; 将久 渡邊

Archive | 2011

Trench embedding method

Masahisa Watanabe; Mitsuhiro Okada

Archive | 2010

Method for removing metal impurity from quartz component part used in heat processing apparatus of batch type

Masahisa Watanabe; Katsutoshi Ishii; Tetsuya Shibata

Archive | 2010

Trench implantation method and film forming device

Mitsuhiro Okada; Masahisa Watanabe; 充弘 岡田; 将久 渡邊

Archive | 2007

Method for processing polysilazane film

Masahisa Watanabe; Tetsuya Shibata

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Collaboration

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Tetsuya Shibata

Tokyo Electron

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Hiroshi Kubota

Tokyo Electron

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Kazuaki Chiba

Tokyo Electron

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Mitsuhiro Okada

Tokyo Electron

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Kazuhide Hasebe

Tokyo Electron

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Katsutoshi Ishii

Tokyo Electron

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Kimiya Aoki

Tokyo Electron

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Shingo Hishiya

Tokyo Electron

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