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Masaki Hirayama

Tokyo Electron

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Publication

Featured researches published by Masaki Hirayama.

Archive | 2002

Microwave plasma processing device, plasma processing method, and microwave radiating member

Tadahiro Ohmi; Masaki Hirayama; Tetsuya Goto

Archive | 2008

Plasma processing system, plasma measurement system, plasma measurement method, and plasma control system

Mitsuo Kato; Masaki Sugiyama; Akihiko Hiroe; Tadahiro Ohmi; Masaki Hirayama

Archive | 2008

PLASMA PROCESSING SYSTEM, ANTENNA, AND USE OF PLASMA PROCESSING SYSTEM

Masaki Hirayama; Tadahiro Ohmi

Archive | 2002

Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus

Naohisa Goto; Tadahiro Ohmi; Masaki Hirayama; Tetsuya Goto

Archive | 2008

PLASMA PROCESSING APPARATUS, POWER SUPPLY APPARATUS AND METHOD FOR OPERATING PLASMA PROCESSING APPARATUS

Masaki Hirayama; Tadahiro Ohmi

Archive | 2008

Plasma processing apparatus and method for using plasma processing apparatus

Masaki Hirayama; Tadahiro Ohmi

Archive | 2002

Microwave plasma processing apparatus, plasma ignition method, plasma forming method, and plasma processing method

Tadahiro Ohmi; Masaki Hirayama; Shigetoshi Sugawa; Tetsuya Goto

Archive | 2004

Fluorine-containing carbon film forming method

Tadahiro Ohmi; Masaki Hirayama

Archive | 2004

Method of forming fluorinated carbon film

Tadahiro Ohmi; Masaki Hirayama

Archive | 2006

Plasma processing apparatus, plasma processing method and wave retardation plate

Tadahiro Ohmi; Masaki Hirayama; Shigetoshi Sugawa; Tetsuya Goto

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Collaboration

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Tadahiro Ohmi

Tokyo Electron

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Tetsuya Goto

Tokyo Electron

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Shigetoshi Sugawa

Tokyo Electron

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Naohisa Goto

Tokyo Electron

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Akihiko Hiroe

Tokyo Electron

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Kohei Watanuki

Tokyo Electron

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Masafumi Kitano

Tokyo Electron

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Masaki Sugiyama

Tokyo Electron

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Mitsuo Kato

Tokyo Electron

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Shigemi Murakawa

Tokyo Electron

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