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Dive into the research topics where Masanobu Tsuchitani is active.

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Featured researches published by Masanobu Tsuchitani.


international symposium on power semiconductor devices and ic s | 1998

4.5 kV IGBT junction termination technique using the SIPOS RESURF structure

Shizue Hori; Masanobu Tsuchitani; Akihiko Oosawa; Yoshiro Baba; Shigeo Yawata

In order to obtain high voltage and high reliability devices, the semi-insulating polycrystalline silicon (SIPOS) film and reduced surface field (RESURF) structure are selected from several planar junction termination techniques. A 4.5 kV IGBT was realized using the SIPOS RESURF structure with some optimizations. The termination structure is optimized for high voltage by the RESURF length and the boron ion implantation dosage of the RESURF layer. The SIPOS film is optimized to reduce transient voltage-induced leakage current (TVIC) and to obtain high reliability. As a result, a 5.0 kV static blocking voltage IGBT without TVIC is realized using a 525 /spl mu/m thickness/450 /spl Omega/cm resistivity substrate.


Archive | 1995

Vertical power MOSFET and process of fabricating the same

Yoshiro Baba; Satoshi Yanagiya; Noboru Matsuda; Akihiko Osawa; Masanobu Tsuchitani


Archive | 1999

Semiconductor gate trench with covered open ends

Masanobu Tsuchitani; Keita Suzuki; Akihiko Osawa; Yoshiro Baba


Archive | 2004

Semiconductor device and fabrication method of the same

Masanobu Tsuchitani; Tetsuo Matsuda; Hideki Okumura; Atsuko Yamashita


Archive | 1997

Method for manufacturing a vertical transistor having a trench gate

Noboru Matsuda; Yoshiro Baba; Satoshi Yanagiya; Masanobu Tsuchitani


Archive | 2005

Trench MIS device and method for manufacturing trench MIS device

Noboru Matsuda; Koichi Takahashi; Keiko Kawamura; Masanobu Tsuchitani


Archive | 2007

POWER SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SAME, AND METHOD FOR DRIVING SAME

Ichiro Omura; Yoko Sakiyama; Hideki Nozaki; Atsushi Murakoshi; Masanobu Tsuchitani; Koichi Sugiyama; Tsuneo Ogura; Masakazu Yamaguchi; Tatsuo Naijo


Archive | 2000

Semiconductor device having high breakdown voltage and method for manufacturing the device

Masanobu Tsuchitani; Shingo Satou


Archive | 1999

Semiconductor device having directionally balanced gates and manufacturing method

Shigeru Hasegawa; Hideo Matsuda; Yoshiro Baba; Masanobu Tsuchitani


Archive | 2005

Semiconductor device with a gate electrode including a pair of polysilicon layers

Keiko Kawamura; Masanobu Tsuchitani

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