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Masayoshi Sagehashi

Shin-Etsu Chemical

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Publication

Featured researches published by Masayoshi Sagehashi.

Archive | 2012

PATTERNING PROCESS AND RESIST COMPOSITION USED FOR THE SAME

Jun Hatakeyama; 畠山 潤; Masayoshi Sagehashi; 正義 提箸; Takeshi Watanabe; 武 渡辺; Kazuhiro Katayama; 和弘 片山

Archive | 2009

Fluorine-containing monomer, fluorine-containing polymer compound, resist material, and method for forming pattern

Yuji Harada; Koji Hasegawa; Hiroshi Morisawa; Masayoshi Sagehashi; Takao Yoshihara; 裕次 原田; 隆夫 吉原; 正義 提箸; 拓 森澤; 幸士 長谷川

Archive | 2006

Sulfonium salt, resist material, and pattern forming method

Tomohiro Kobayashi; Masaki Ohashi; Yoichi Osawa; Masayoshi Sagehashi; 正樹 大橋; 洋一 大澤; 知洋 小林; 正義 提箸

Archive | 2010

ACID-LABILE ESTER MONOMER HAVING SPIROCYCLIC STRUCTURE, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS

Takeshi Kinsho; Tomohiro Kobayashi; Masayoshi Sagehashi; Takeru Watanabe; Koji Hasegawa; Seiichiro Tachibana

Archive | 2015

Monomer, polymer, resist composition, and patterning process

Masayoshi Sagehashi; Koji Hasegawa; Kazuhiro Katayama

Archive | 2013

Sulfonium salt, resist material and patterning process

Masaki Ohashi; 正樹 大橋; Tomohiro Kobayashi; 知洋 小林; Akihiro Seki; 明寛 関; Masayoshi Sagehashi; 正義 提箸; Masahiro Fukushima; 将大 福島

Archive | 2010

Sulfonium salt, resist material, and method for pattern formation

Tomohiro Kobayashi; Yoichi Osawa; Masayoshi Sagehashi; 洋一 大澤; 知洋 小林; 正義 提箸

Archive | 2014

Patterning process, resist composition, polymer, and monomer

Koji Hasegawa; Masayoshi Sagehashi; Kazuhiro Katayama; Tomohiro Kobayashi

Archive | 2012

Polymer, chemically amplified resist composition, and patterning process using said chemically amplified resist composition

Masayoshi Sagehashi; Youichi Ohsawa; Koji Hasegawa; Tomohiro Kobayashi

Archive | 2013

PREPARATION OF POLYMER, RESULTING POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS

Masaki Ohashi; Tomohiro Kobayashi; Masayoshi Sagehashi

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Collaboration

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Koji Hasegawa

Shin-Etsu Chemical

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Tomohiro Kobayashi

Shin-Etsu Chemical

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Masaki Ohashi

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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Kazuhiro Katayama

Shin-Etsu Chemical

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Yoichi Osawa

Shin-Etsu Chemical

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Masahiro Fukushima

Shin-Etsu Chemical

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Takayuki Nagasawa

Shin-Etsu Chemical

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Takeru Watanabe

Shin-Etsu Chemical

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Youichi Ohsawa

Shin-Etsu Chemical

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