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Masahiro Fukushima

Shin-Etsu Chemical

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Publication

Featured researches published by Masahiro Fukushima.

Archive | 2014

Sulfonium salt, polymeric compound, resist material, and pattern forming method

Masahiro Fukushima; 将大 福島; Jun Hatakeyama; 畠山 潤; Masaki Ohashi; 正樹 大橋; Teppei Adachi; 鉄平 阿達

Archive | 2014

Sulfonium salt, chemically amplified resist composition, and pattern forming process

Masaki Ohashi; Masahiro Fukushima; Tomohiro Kobayashi; Ryosuke Taniguchi

Archive | 2013

PHOTOACID GENERATOR, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERNING PROCESS

Masaki Ohashi; Masahiro Fukushima

Archive | 2013

Sulfonium salt, resist material and patterning process

Masaki Ohashi; 正樹 大橋; Tomohiro Kobayashi; 知洋 小林; Akihiro Seki; 明寛 関; Masayoshi Sagehashi; 正義 提箸; Masahiro Fukushima; 将大 福島

Archive | 2016

Onium salt compound, resist composition, and pattern forming process

Masahiro Fukushima; Masaki Ohashi; Jun Hatakeyama

Archive | 2013

Sulfonium salt, polymer, polymer making method, resist composition, and patterning process

Masaki Ohashi; Jun Hatakeyama; Teppei Adachi; Masahiro Fukushima

Archive | 2015

SULFONIUM SALT, RESIST COMPOSITION AND RESIST PATTERN FORMING PROCESS

Daisuke Domon; Satoshi Watanabe; Keiichi Masunaga; Masahiro Fukushima

Archive | 2012

Sulfonium salt and polymeric compound, resist material and pattern forming method, and production method of the polymeric compound

Masaki Ohashi; 正樹 大橋; Jun Hatakeyama; 畠山 潤; Teppei Adachi; 鉄平 阿達; Masahiro Fukushima; 将大 福島

Archive | 2017

COMPOUND, POLYMER COMPOUND, RESIST COMPOSITION, AND PATTERNING PROCESS

Masaki Ohashi; Jun Hatakeyama; Masahiro Fukushima; Takayuki Fujiwara

Archive | 2015

Silicone skeleton-containing polymer compound and method for producing same, chemically amplified negative resist composition, photo-curable dry film and method for producing same, patterning process, layered product, and substrate

Hiroyuki Urano; Masashi Iio; Katsuya Takemura; Koji Hasegawa; Masahiro Fukushima; Takayuki Fujiwara

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Collaboration

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Masaki Ohashi

Shin-Etsu Chemical

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Koji Hasegawa

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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Takayuki Fujiwara

Shin-Etsu Chemical

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Hiroyuki Urano

Shin-Etsu Chemical

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Katsuya Takemura

Panasonic

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Masashi Iio

Shin-Etsu Chemical

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Masayoshi Sagehashi

Shin-Etsu Chemical

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Satoshi Watanabe

Kanazawa University

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Teppei Adachi

Shin-Etsu Chemical

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