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Dive into the research topics where Masayuki Kumekawa is active.

Publication


Featured researches published by Masayuki Kumekawa.


Archive | 2003

Electrolytic processing apparatus and method

Mitsuhiko Shirakashi; Masayuki Kumekawa; Hozumi Yasuda; Itsuki Kobata; Osamu Nabeya


Archive | 2000

Method and apparatus for plating substrate and plating facility

Satoshi Sendai; Akihisa Hongo; Kenya Tomioka; Katsumi Tsuda; Masayuki Kumekawa; Naoaki Ogure; Kenichi Sasabe


Archive | 2002

Electrolytic processing device and substrate processing apparatus

Itsuki Kobata; Mitsuhiko Shirakashi; Masayuki Kumekawa; Takayuki Saito; Yasushi Toma; Tsukuru Suzuki; Kaoru Yamada; Yuji Makita


Archive | 2009

Substrate polishing apparatus and method

Seiji Katsuoka; Masahiko Sekimoto; Junji Kunisawa; Mitsuru Miyazaki; Teruyuki Watanabe; Kenichi Kobayashi; Masayuki Kumekawa; Toshio Yokoyama


Archive | 2002

Method and device for regenerating ion exchanger, and electrolytic processing apparatus

Takayuki Saito; Tsukuru Suzuki; Yuji Makita; Kaoru Yamada; Masayuki Kumekawa; Hozumi Yasuda; Osamu Nabeya; Kazuto Hirokawa; Mitsuhiko Shirakashi; Yasushi Toma; Itsuki Kobata


Archive | 2003

Electrolytic processing apparatus and substrate processing apparatus and method

Mitsuhiko Shirakashi; Masayuki Kumekawa; Hozumi Yasuda; Itsuki Kobata; Ikutaro Noji; Kaori Yoshida


Archive | 2003

Chemical mechanical polishing endpoint detection system and method

Norio Kimura; Huey-Ming Wang; Masayuki Kumekawa


Archive | 2002

Substrate processing appartus and method

Itsuki Kobata; Mitsuhiko Shirakashi; Masayuki Kumekawa; Takayuki Saito; Yasushi Toma; Tsukuru Suzuki; Kaoru Yamada; Yuji Makita; Hozumi Yasuda


Archive | 2005

Electrolytic processing apparatus

Masayuki Kumekawa; Norio Kimura; Yukio Fukunaga; Katsuyuki Musaka


Archive | 2005

Electrolytic processing method

Masayuki Kumekawa; Norio Kimura; Yukio Fukunaga; Katsuyuki Musaka; Hariklia Deligianni; Emanuel I. Cooper; Philippe Vereecken

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