Mitsuhiko Shirakashi | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Mitsuhiko Shirakashi is active.

Explore More

Publication

Featured researches published by Mitsuhiko Shirakashi.

Archive | 2003

Electrolytic processing apparatus and method

Mitsuhiko Shirakashi; Masayuki Kumekawa; Hozumi Yasuda; Itsuki Kobata; Osamu Nabeya

Archive | 2010

Apparatus and method for cleaning semiconductor substrate

Hiroshi Yokohama-shi Tomita; Soichi Nadahara; Mitsuhiko Shirakashi; Kenya Ito; Yuki Inoue

Archive | 2004

Electrochemical machining method and apparatus

Yuzo Mori; Mitsuhiko Shirakashi; Yasushi Toma; Itsuki Kobata; Takayuki Saito

Archive | 2000

Electrolytic machining method and apparatus

Yuzo Mori; Mitsuhiko Shirakashi; Takayuki Saito; Yasushi Toma; Akira Fukunaga; Itsuki Kobata

Archive | 2002

Electrolytic processing device and substrate processing apparatus

Itsuki Kobata; Mitsuhiko Shirakashi; Masayuki Kumekawa; Takayuki Saito; Yasushi Toma; Tsukuru Suzuki; Kaoru Yamada; Yuji Makita

Archive | 2006

Device for and method of polishing peripheral edge of semiconductor wafer

Tamami Takahashi; Kenya Ito; Mitsuhiko Shirakashi; Kazuyuki Inoue; Kenji Yamaguchi; Masaya Seki; Satoru Sato; Jun Watanabe; Kenji Kato; Jun Tamura; Souichi Asakawa

Archive | 2001

Cleaning method and cleaner

Hiroshi Tomita; Motoyuki Sato; Soichi Nadahara; Mitsuhiko Shirakashi; Kenya Ito

Archive | 2000

Apparatus for cleaning a substrate such as a semiconductor wafer

Naoki Matsuda; Kenya Ito; Mitsuhiko Shirakashi

Archive | 2003

Electrochemical machining device and electrochemical machining method

Itsuki Kobata; Masayuki Kumekawa; Osamu Nabeya; Roberto Massahiro Serikawa; Takayuki Saito; Tsukuru Suzuki; Akira Kodera; Hozumi Yasuda; Takeshi Iizumi; Mitsuhiko Shirakashi

Archive | 2000