Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Mitsuhiko Shirakashi is active.

Publication


Featured researches published by Mitsuhiko Shirakashi.


Archive | 2003

Electrolytic processing apparatus and method

Mitsuhiko Shirakashi; Masayuki Kumekawa; Hozumi Yasuda; Itsuki Kobata; Osamu Nabeya


Archive | 2010

Apparatus and method for cleaning semiconductor substrate

Hiroshi Yokohama-shi Tomita; Soichi Nadahara; Mitsuhiko Shirakashi; Kenya Ito; Yuki Inoue


Archive | 2004

Electrochemical machining method and apparatus

Yuzo Mori; Mitsuhiko Shirakashi; Yasushi Toma; Itsuki Kobata; Takayuki Saito


Archive | 2000

Electrolytic machining method and apparatus

Yuzo Mori; Mitsuhiko Shirakashi; Takayuki Saito; Yasushi Toma; Akira Fukunaga; Itsuki Kobata


Archive | 2002

Electrolytic processing device and substrate processing apparatus

Itsuki Kobata; Mitsuhiko Shirakashi; Masayuki Kumekawa; Takayuki Saito; Yasushi Toma; Tsukuru Suzuki; Kaoru Yamada; Yuji Makita


Archive | 2006

Device for and method of polishing peripheral edge of semiconductor wafer

Tamami Takahashi; Kenya Ito; Mitsuhiko Shirakashi; Kazuyuki Inoue; Kenji Yamaguchi; Masaya Seki; Satoru Sato; Jun Watanabe; Kenji Kato; Jun Tamura; Souichi Asakawa


Archive | 2001

Cleaning method and cleaner

Hiroshi Tomita; Motoyuki Sato; Soichi Nadahara; Mitsuhiko Shirakashi; Kenya Ito


Archive | 2000

Apparatus for cleaning a substrate such as a semiconductor wafer

Naoki Matsuda; Kenya Ito; Mitsuhiko Shirakashi


Archive | 2003

Electrochemical machining device and electrochemical machining method

Itsuki Kobata; Masayuki Kumekawa; Osamu Nabeya; Roberto Massahiro Serikawa; Takayuki Saito; Tsukuru Suzuki; Akira Kodera; Hozumi Yasuda; Takeshi Iizumi; Mitsuhiko Shirakashi


Archive | 2000

Apparatus for cleaning substrate

Kenya Ito; Naoki Matsuda; Mitsuhiko Shirakashi; Fumitoshi Oikawa; Koji Ato

Collaboration


Dive into the Mitsuhiko Shirakashi's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge