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Matagoro Maeno

Hitachi

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Publication

Featured researches published by Matagoro Maeno.

Archive | 1989

Metal material with film passivated by fluorination and apparatus composed of the metal material

Tadahiro Ohmi; Masahiro Miki; Hirohisa Kikuyama; Matagoro Maeno

Archive | 1995

Etching agent, electronic device and method of manufacturing the device

Matagoro Maeno; Masayuki Miyashita; Hirohisa Kikuyama; Tatsuhiro Yabune; Jun Takano; Hirofumi Fukui; Satoshi Miyazawa; Chisato Iwasaki; Tadahiro Ohmi; Yasuhiko Kasama; Hitoshi Seki

Archive | 1991

Dry etching apparatus with diluted anhydrous hydrogen fluoride gas generator

Tadahiro Ohmi; Masahiro Miki; Hirohisa Kikuyama; Matagoro Maeno

Archive | 1989

Method of anhydrous hydrogen fluoride etching

Tadahiro Ohmi; Masahiro Miki; Hirohisa Kikuyama; Matagoro Maeno

Archive | 1992

Method for recovering calcium fluoride from fluoroetchant

Tadahiro Ohmi; Hiroyuki Harada; Nobuhiro Miki; Toshiro Fukutome; Matagoro Maeno; Norio Terasawa; Yoshihiro Eto; Masahiro Sakata

Archive | 1999

Industrial material with fluorine passivated film and process of manufacturing the same

Tadahiro Ohmi; Kazuo Chiba; Yutaka Mikasa; Kenji Ishigaki; Nobuhiro Miki; Matagoro Maeno; Hirohisa Kikuyama

Archive | 1992

Method of supplying dilute hydrofluoric acid and apparatus for use in this method for supplying the acid

Tadahiro Ohmi; Nobuhiro Miki; Matagoro Maeno; Ryozi Hirayama

Archive | 1992

Flow type liquid cell for infrared rays

Ichiro Kawabe; Matagoro Maeno; Masahiro Miki; Tadahiro Omi; 正博 三木; 又五郎 前野; 忠弘 大見; 一郎 川辺

Archive | 1993

Apparatus for recovering calcium fluoride from fluoroetchant

Tadahiro Ohmi; Hiroyuki Harada; Nobuhiro Miki; Toshiro Fukutome; Matagoro Maeno; Norio Terasawa; Yoshihiro Eto; Masahiro Sakata

Archive | 1994

Treatment of acidic fluorine-containing water

Toshiro Fukutome; Matagoro Maeno; Masahiro Miki; Tadahiro Omi; Shin Sato; Tadashi Takadoi; 正博 三木; 伸 佐藤; 又五郎 前野; 忠弘 大見; 敏郎 福留; 忠 高土居

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Collaboration

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Tadahiro Ohmi

Mitsubishi

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Nobuhiro Miki

Hitachi

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Hirohisa Kikuyama

Tohoku University

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Toshiro Fukutome

Hitachi

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Kazuo Chiba

Mitsubishi

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Yutaka Mikasa

Mitsubishi

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Hiroyuki Harada

Hitachi

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Masahiro Sakata

Hitachi

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Norio Terasawa

Hitachi

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Yoshihiro Eto

Hitachi

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