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Dive into the research topics where Shamouil Shamouilian is active.

Publication


Featured researches published by Shamouil Shamouilian.


Archive | 1997

High density plasma process chamber

Shamouil Shamouilian; Ananda H. Kumar; Arnold Kholodenko; Dennis S. Grimard; Jonathan D. Mohn; Michael G. Chafin; Kenneth S. Collins


Archive | 2002

Toroidal plasma source for plasma processing

Michael S. Cox; Canfeng Lai; Robert B. Majewski; David Wanamaker; Christopher T. Lane; Peter K. Loewenhardt; Shamouil Shamouilian; John Parks


Archive | 1997

Electrostatic chuck having improved gas conduits

Edwin C. Weldon; Kenneth S. Collins; Arik Donde; Brian Lue; Dan Maydan; Robert J. Steger; Timothy Dyer; Ananda H. Kumar; Alexander M. Veytser; Kadthala R. Narendrnath; Semyon L. Kats; Arnold Kholodenko; Shamouil Shamouilian; Dennis S. Grimard


Archive | 2002

Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas

Shamouil Shamouilian; Canfeng Lai; Michael S. Cox; Padmanabhan Krishnaraj; Tsutomu Tanaka; Sebastien Raoux; Peter I. Porshnev; Thomas Nowak


Archive | 2004

Multi-core transformer plasma source

Canfeng Lai; Michael S. Cox; Peter K. Loewenhardt; Tsutomu Tanaka; Shamouil Shamouilian


Archive | 2005

In situ application of etch back for improved deposition into high-aspect-ratio features

Padmanabhan Krishnaraj; Pavel Ionov; Canfeng Lai; Michael S. Cox; Shamouil Shamouilian


Archive | 1994

Electrostatic chuck for magnetic flux processing

Shamouil Shamouilian; John F. Cameron; Chandra Deshpandey; Yuh-Jia Su


Archive | 1995

Chemical-mechanical polishing pad providing polishing unformity

Shamouil Shamouilian; Daniel O. Clark


Archive | 1999

Electrostatic chuck having gas cavity and method

Arnold Kholodenko; Shamouil Shamouilian; You Wang; Wing L. Cheng; Alexander M. Veytser; Surinder S. Bedi; Kadthala R. Narendrnath; Semyon L. Kats; Dennis S. Grimard; Ananda H. Kumar


Archive | 1998

Electrostatic chuck capable of rapidly dechucking a substrate

Ananda H. Kumar; Shamouil Shamouilian

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