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Tony S. Kaushal

Applied Materials

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Publication

Featured researches published by Tony S. Kaushal.

Archive | 2000

Porous ceramic liner for a plasma source

Kartik Ramaswamy; Kwok Manus Wong; Ashish Bhatnagar; Mehran Moalem; Tony S. Kaushal; Shamouil Shamouilian

Archive | 1999

Abatement of hazardous gases in effluent

Shamouil Shamouilian; Tony S. Kaushal

Archive | 2002

Abatement of fluorine gas from effluent

Shamouil Shamouilian; Mehran Moalem; Tony S. Kaushal

Archive | 2001

Corrosion resistant coating for semiconductor processing chamber

Tony S. Kaushal; Chuong Quang Dam

Archive | 2000

Erosion resistant gas energizer

Ashish Bhatnagar; Kartik Ramaswamy; Tony S. Kaushal; Kwok Manus Wong; Shamouil Shamouilian

Archive | 2001

Erosion-resistant components for plasma process chambers

Tony S. Kaushal; You Wang; Ananda H. Kumar

Archive | 2007

Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing

Dmitry Lubomirsky; Sudhir Gondhalekar; Kadthala R. Narendrnath; Muhammad Rasheed; Tony S. Kaushal

Archive | 2004

Method and apparatus for polishing metal and dielectric substrates

Yongsik Moon; David H. Mai; Kapila Wijekoon; Rajeev Bajaj; Rahul K. Surana; Yongqi Hu; Tony S. Kaushal; Shijian Li; Jui-Lung Li; Shi-Ping Wang; Gary Lam; Fred C. Redeker

Archive | 2007

Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing

Kadthala R. Narendrnath; Sudhir Gondhalekar; Dmitry Lubomirsky; Muhammad Rasheed; Tony S. Kaushal

Archive | 2002

Elements having erosion resistance

Tony S. Kaushal; Chuong Quang Dam

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Shamouil Shamouilian

Applied Materials

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Ashish Bhatnagar

Applied Materials

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Kwok Manus Wong

Applied Materials

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Kartik Ramaswamy

Applied Materials

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Chuong Quang Dam

Applied Materials

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Dmitry Lubomirsky

Applied Materials

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Mehran Moalem

Applied Materials

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Muhammad Rasheed

Applied Materials

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Sudhir Gondhalekar

Applied Materials

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Yongqi Hu

Applied Materials

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