Mei Sheng Zhou
Chartered Semiconductor Manufacturing
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Mei Sheng Zhou.
Solid State Phenomena | 2007
Boon Cheng Goh; Felicia Goh; Christopher Lim; Zainab Ismail; Mei Sheng Zhou
Megasonic cleaning using de-gassed water (less than 2ppm N2, O2, CO2) in a 300mm batch immersion tool often does not give optimal particle performance, with particle streaks and clusters added onto the wafer, and low particle removal efficiency (PRE). When water was re-gasified with N2, the resultant stable cavitation activity reduced particle adders and increased PRE. With N2 concentration increased to just above 5ppm, number of particle adders decreased by three folds. Optimal particle performance could be obtained by operating at an N2 level close to saturation.
Archive | 2000
Mei Sheng Zhou; Sangki Hong; Simon Chooi
Archive | 1999
Simon Chooi; Mei Sheng Zhou; Yi Xu
Archive | 2001
Subhash Gupta; Yi Xu; Simon Chooi; Mei Sheng Zhou
Archive | 2002
Licheng M. Han; Xu Yi; Joseph Zhifeng Xie; Mei Sheng Zhou; Simon Chooi
Archive | 2003
Wenhe Lin; Mei Sheng Zhou; Kin Leong Pey; Simon Chooi
Archive | 2000
Mei Sheng Zhou; Simon Chooi; Yi Xu
Archive | 2002
Simon Chooi; Subhash Gupta; Mei Sheng Zhou; Sang Ki Hong
Archive | 2000
Simon Chooi; Wenhe Lin; Mei Sheng Zhou
Archive | 1999
Simon Chooi; Yi Xu; Mei Sheng Zhou
Collaboration
Dive into the Mei Sheng Zhou's collaboration.
