Meikei Ieong

High performance CMOS fabricated on hybrid substrate with different crystal orientations

A novel structure and technology has been developed for high performance CMOS using hybrid silicon substrates with different crystal orientations (namely pFET on [110]-oriented surface and nFET on (100) surface) through wafer bonding and selective epitaxy. CMOS devices with physical gate oxide thickness of 1.2 nm have been demonstrated, with substantial enhancement of pFET drive current at L/sub poly//spl les/80 nm.

Characteristics and device design of sub-100 nm strained Si N- and PMOSFETs

Current drive enhancements were demonstrated in the strained-Si PMOSFETs with sub-100 nm physical gate lengths for the first time, as well as in the NMOSFETs with well-controlled threshold voltage V/sub T/ and overlap capacitance C/sub OV/ characteristics for L/sub poly/ and L/sub eff/ below 80 nm and 60 nm. A 110% enhancement in the electron mobility was observed in the strained Si devices with 1.2% tensile strain (28% Ge content in the relaxed SiGe buffer), along with a 45% increase in the peak hole mobility.

FinFET design considerations based on 3-D simulation and analytical modeling

Design considerations of the FinFET have been investigated by three-dimensional (3-D) simulation and analytical modeling in this paper. Short-channel effects (SCE) of the FinFET can be reasonably controlled by reducing either silicon fin height or fin thickness. Analytical solution of 3-D Laplaces equation is employed to establish the design equations for the subthreshold behavior in the fully depleted silicon fins. Based on the 3-D analytical electrostatic potential in the subthreshold region, the threshold voltage (V/sub th/) roll-off and the subthreshold swing (S) are estimated by considering the source barrier changes in the most leaky channel path. V/sub th/ roll-off is an exponential function of the ratio of effective channel length to drain potential decay length, which can then be expressed as a function of the fin thickness, the fin height and the gate oxide thickness. The drain-potential decay lengths of single-gate fully depleted SOI MOSFET (FDFET), double-gate MOSFET (DGFET), rectangular surrounding-gate MOSFET (SGFET), and FinFET are compared. The drain potential scaling length and V/sub th/ roll-off can be included into a universal relation for convenient comparison.

Metal-gate FinFET and fully-depleted SOI devices using total gate silicidation

Metal-gate FinFET and FDSOI devices were fabricated using total gate silicidation. Devices satisfy the following metal-gate technology requirements: ideal mobility, low gate leakage, high transconductance, competitive I/sub on//I/sub off/, and adjustable V/sub t/. Six silicide gate materials are presented, as well as two silicide workfunction engineering methods.

Fabrication and mobility characteristics of ultra-thin strained Si directly on insulator (SSDOI) MOSFETs

A tensile-strained Si layer was transferred to form an ultra-thin (<20 nm) strained Si directly on insulator (SSDOI) structure. MOSFETs were fabricated, and for the first time, electron and hole mobility enhancements were demonstrated on strained Si directly on insulator structures with no SiGe layer present under the strained Si channel.

Strained Si NMOSFETs for high performance CMOS technology

Performance enhancements in strained Si NMOSFETs were demonstrated at L/sub eff/<70 nm. A 70% increase in electron mobility was observed at vertical fields as high as 1.5 MV/cm for the first time, suggesting a new mobility enhancement mechanism in addition to reduced phonon scattering. Current drive increase by /spl ges/35% was observed at L/sub eff/<70 nm. These results indicate that strain can be used to improve CMOS device performance at sub-100 nm technology nodes.

Self-aligned n-channel germanium MOSFETs with a thin Ge oxynitride gate dielectric and tungsten gate

In this letter, we report self-aligned n-channel germanium (Ge) MOSFETs with a thin Ge oxynitride gate dielectric and tungsten gate electrode. Excellent off-state current is achieved through the reduction of junction leakage. For the first time, we have demonstrated an n-channel Ge MOSFET with a subthreshold slope of 150 mV/dec and an on-off current ratio of /spl sim/10/sup 4/.

Hybrid-orientation technology (HOT): opportunities and challenges

At the onset of innovative device structures intended to extend the roadmap for silicon CMOS, many techniques have been investigated to improve carrier mobility in silicon MOSFETs. A novel planar silicon CMOS structure, seeking optimized surface orientation, and hence carrier mobilities for both nFETs and pFETs, emerged. Hybrid-orientation technology provides nFETs on (100) surface orientation and pFETs on [110] surface orientation through wafer bonding and silicon selective epitaxy. The fabrication processes and device characteristics are reviewed in this paper.

Extreme scaling with ultra-thin Si channel MOSFETs

We examine the scaling limits for planar single gate technology using the ultra-thin Si channel MOSFET. Characteristics for extreme scaled devices with physical gate lengths down to 6 nm and SOI channels as thin as 4 nm are presented. For the first time, we report ring oscillators with 26 nm gate lengths and ultra-thin Si channels.

Electrical integrity of state-of-the-art 0.13 /spl mu/m SOI CMOS devices and circuits transferred for three-dimensional (3D) integrated circuit (IC) fabrication

We introduce a new scheme for building three-dimensional (3D) integrated circuits (ICs) based on the layer transfer of completed devices. We demonstrate for the first time that the processes required for stacking active device layers preserve the intrinsic electrical characteristics of state-of-the-art short-channel MOSFETs and ring oscillator circuits, which is critical to the success of high performance 3D ICs.