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Michael Albert Leach

IBM

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Featured researches published by Michael Albert Leach.

Archive | 1988

In situ conductivity monitoring technique for chemical/mechanical planarization endpoint detection

Carter Welling Kaanta; Michael Albert Leach

Archive | 1988

Wafer flood polishing

William J. Cote; Michael Albert Leach

Archive | 1988

Via-filling and planarization technique

William J. Cote; Carter Welling Kaanta; Michael Albert Leach; James K. Paulsen

Archive | 1988

Process for defining organic sidewall structures

William J. Cote; Donald M. Kenney; Michael L. Kerbaugh; Michael Albert Leach; Jeffrey A. Robinson; Robert Wayne Sweetser

Archive | 1988

System for mechanical planarization

Michael Albert Leach; James K. Paulsen; Brian John Machesney; Daniel John Venditti; Chris R. Whitaker

Archive | 1993

Polishstop planarization method and structure

Peter A. Burke; Michael Albert Leach

Archive | 1987

VLSI coaxial wiring structure

John Edward Cronin; Michael Albert Leach

Archive | 1992

Device and method for detecting an end point in polishing operation

Michael Albert Leach; Brian John Machesney; Edward J. Nowak

Archive | 1993

Device for detecting an end point in polishing operations

Michael Albert Leach; Brian John Machesney; Edward J. Nowak

Archive | 1994

Refractory metal-titanium nitride conductive structures

John Edward Cronin; Carter Welling Kaanta; Michael Albert Leach; Pei-Ing Paul Lee

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William J. Cote

IBM

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Carter Welling Kaanta

IBM

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Brian John Machesney

IBM

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John Edward Cronin

IBM

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Edward J. Nowak

IBM

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James K. Paulsen

IBM

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Chris R. Whitaker

IBM

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Daniel John Venditti

IBM

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Donald M. Kenney

IBM

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Jeffrey A. Robinson

IBM

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