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Pai-Hsueh Yang

Nikon

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Publication

Featured researches published by Pai-Hsueh Yang.

Archive | 2008

Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

Michael B. Binnard; Wen-Hou Ma; Toshio Ueta; Pai-Hsueh Yang; Ting-Chien Teng; Bausan Yuan

Archive | 2004

E/I core actuator commutation formula and control method

Pai-Hsueh Yang; Kazuhiro Hirano; Ping-Wei Chang; Tim Teng; Bausan Yuan

Archive | 2007

On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage

Pai-Hsueh Yang; Bausan Yuan; Kazuo Masaki; Kazuhiro Hirano; Xiao-Feng Yang; Scott Coakley; Michael B. Binnard

Archive | 2009

Control Systems and Methods for Compensating for Effects of a Stage Motor

Michael B. Binnard; Scott Coakley; Douglas C. Watson; Pai-Hsueh Yang

Archive | 2014

MAGNETIC SENSOR CALIBRATION AND SERVO FOR PLANAR MOTOR STAGE

Pai-Hsueh Yang; Michael B. Binnard; J. Kyle Wells; Chetan Mahadeswaraswamy; Tsutomu Ogiwara

Archive | 2015

MAGNET ARRAY FOR MOVING MAGNET PLANAR MOTOR

Pai-Hsueh Yang; Takakuni Goto; Kazuhiro Hirano

Archive | 2014

Dynamic Correction to Remove the Influence of Motor Coil Flux on Hall Sensor Measurement

Pai-Hsueh Yang; Narutaka Yanagiya; Takakuni Goto; Tsutomu Ogiwara; Kazuhiro Hirano

Archive | 2011

Synchronization control devices and methods

Pai-Hsueh Yang; Kazuhiro Hirano; Masao Yuasa

Archive | 2011

METHODS FOR LIMITING COUNTER-MASS TRIM-MOTOR FORCE AND STAGE ASSEMBLIES INCORPORATING SAME

Pai-Hsueh Yang; Michael B. Binnard; Scott Coakley

IEEJ journal of industry applications | 2018

Acoustic Wave Equation Based Modeling and Collocated Side Vibration Cancellation for Pneumatic Cylinder

Wataru Ohnishi; Hiroshi Fujimoto; Pai-Hsueh Yang; Ping-Wei Chang; Bausan Yuan; Koichi Sakata; Atsushi Hara

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Kazuhiro Hirano

Nikon

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Michael B. Binnard

Nikon

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Bausan Yuan

Nikon

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Ping-Wei Chang

Nikon

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Scott Coakley

Nikon

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Tsutomu Ogiwara

Nikon

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J. Kyle Wells

Nikon

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Koichi Sakata

Nikon

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Takakuni Goto

Nikon

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Atsushi Hara

Nikon

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