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Bausan Yuan

Nikon

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Publication

Featured researches published by Bausan Yuan.

Archive | 2005

Projection optical device and exposure apparatus

Akimitsu Ebihara; Martin E. Lee; Bausan Yuan

Archive | 2001

Following stage planar motor

Michael Binnard; Bausan Yuan

Archive | 2001

Moving coil type planar motor control

Toshio Ueta; Bausan Yuan

Archive | 2003

Control system and method for improving tracking accuracy of a stage through processing of information from previous operations

Pai-Hsueh Yang; Bausan Yuan; Susumu Makinouchi; Yoshiji Itakura; Kazuhiro Hirano; Hideyuki Hashimoto; Ryoichi Kawaguchi

Archive | 2001

Reaction mass for a stage device

Bausan Yuan; Michael Binnard

Archive | 2001

Moving magnet type planar motor control

Toshio Ueta; Bausan Yuan; Ting-Chien Teng

Archive | 2008

Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

Michael B. Binnard; Wen-Hou Ma; Toshio Ueta; Pai-Hsueh Yang; Ting-Chien Teng; Bausan Yuan

Archive | 2005

Fine force actuator assembly for chemical mechanical polishing apparatuses

W. Thomas Novak; Douglas C. Watson; Pai-Hsueh Yang; Bausan Yuan

Archive | 2002

Image adjustor including damping assembly

Bausan Yuan; Martin Lee; Takeshi Asami

Journal of the Acoustical Society of America | 2000

Active vibration isolation system having pressure control

Bausan Yuan; Michael B. Binnard; Martin E. Lee

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Collaboration

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Martin E. Lee

Nikon

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Pai-Hsueh Yang

Nikon

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Michael B. Binnard

Nikon

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Kazuhiro Hirano

Nikon

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Hideyuki Hashimoto

Nikon

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Akimitsu Ebihara

Nikon

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Scott Coakley

Nikon

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Shiang-Lung Koo

Nikon

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Toshio Ueta

Nikon

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W. Thomas Novak

Nikon

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