Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Michio Yanagisawa is active.

Publication


Featured researches published by Michio Yanagisawa.


Measurement Science and Technology | 2005

Development of slit-type pressure differentiator using an isothermal chamber

Kenji Kawashima; Tomonori Kato; Yosuke Yamazaki; Michio Yanagisawa; Toshiharu Kagawa

Recently, measurement of the differentiated value of pressure has become necessary to realize precise control of pneumatic apparatuses. This paper proposes a pressure differentiator that contains a slit-type laminar flow element and an isothermal chamber. The underlying principle and the design method for the sensor are detailed. Then, simulations and experiments are conducted. The results verify the effectiveness of the proposed sensor and its potential in future applications.


international conference on control applications | 2004

Application of minor feedback of flow rate to pressure spring system

Tomonori Kato; Toshiharu Kagawa; Kenji Kawashima; Tatsuya Funaki; Michio Yanagisawa

In this paper, the quick response laminar flow sensor (QFS), which is newly developed by our research group, is applied to measure and feedback the output flow rate by a spool type servo valve, and the quick flow control loop up to 20 Hz is realized. By this system, affection by the nonlinearity of the spool type servo valve is compensated. Then, the quick flow control loop is adapted to the pressure control in a pressure tank, as constituting a cascade pressure control system. Finally, the cascade pressure control system is applied to the pressure spring system. Better performance, especially lower energy consumption result is presented in this research.


Archive | 2000

Anti-vibration system in exposure apparatus

Shinji Wakui; Michio Yanagisawa; Takehiko Mayama


Archive | 2004

Anti-vibration system, method of controlling the same, exposure apparatus, and device manufacturing method

Michio Yanagisawa; Toshiharu Kagawa


Archive | 2000

Active vibration damping device, and composite actuator therefor

Michio Yanagisawa; 通雄 柳澤


Archive | 1999

FLOOR PANEL FOR CLEAN ROOM AND DEVICE MANUFACTURING METHOD

Takehiko Mayama; Shinji Wakui; Michio Yanagisawa; 通雄 柳澤; 伸二 涌井; 武彦 間山


Archive | 2005

Anti-vibration mount apparatus, exposure apparatus, and device manufacturing method

Tomoyasu Hata; Michio Yanagisawa; Takashi Maeda; Takashi Shibayama


Archive | 2013

LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD

Kimitaka Ozawa; Michio Yanagisawa


society of instrument and control engineers of japan | 2004

Application of pressure differentiator using isothermal chamber to isolation table

Tomonori Kato; Kenji Kawashima; Michio Yanagisawa; Toshiharu Kagawa


Archive | 2015

IMAGE ACQUIRING APPARATUS

Hiroshi Saito; Michio Yanagisawa

Collaboration


Dive into the Michio Yanagisawa's collaboration.

Top Co-Authors

Avatar

Toshiharu Kagawa

Tokyo Institute of Technology

View shared research outputs
Top Co-Authors

Avatar

Kenji Kawashima

Tokyo Medical and Dental University

View shared research outputs
Top Co-Authors

Avatar

Tomonori Kato

Fukuoka Institute of Technology

View shared research outputs
Top Co-Authors

Avatar
Top Co-Authors

Avatar

Shinji Wakui

Tokyo University of Agriculture and Technology

View shared research outputs
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge