Takehiko Mayama

System identification of anti-vibration units in semiconductor exposure apparatus

System identification of semiconductor exposure apparatus is discussed. It has a multi-degrees-of-freedom mechanism which includes anti-vibration units for microvibration control. A dynamical model of the mechanism is necessary in order to design the microvibration controller. The model is practically constructed in a short time using a subspace method. Identification results are evaluated through experimental data in comparison with a conventional frequency response method.

System Identification and Physical Parameter Estimation of Anti-Vibration Units in Semiconductor Exposure Apparatus

Abstract In this paper, system identification and physical parameter estimation of semiconductor exposure apparatus for active vibration control are discussed. Since the semiconductor exposure apparatus has multi-degrees-of-freedom (multi-DOF) motional mechanism, the apparatus must be treated as a Multi-Input-Multi-Output (MIMO) system. In this paper, subspace based state-space system identification (4SID) method is applied, because it can be applied to MIMO systems easily. Effectiveness of the 4SID method to an MIMO system identification problem is examined through experimental data. An estimation method of physical parameters of the semiconductor exposure apparatus based on the identified models is also presented. Furthermore, a system identification device is described which is developed for modeling of the semiconductor exposure apparatus. It measures input and output data for identification and executes system identification algorithms based on MATLAB commands.