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Michiya Takimoto

Toshiba

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Publication

Featured researches published by Michiya Takimoto.

Archive | 2011

EXPOSURE DETERMINING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND COMPUTER PROGRAM PRODUCT

Toshiya Kotani; Kazuya Fukuhara; Michiya Takimoto; Hidefumi Mukai; Soichi Inoue

Archive | 2011

Pattern verification method, pattern generating method, device fabrication method, pattern verification program, and pattern verification system

Michiya Takimoto; Takeshi Koshiba

Archive | 2014

SEMICONDUCTOR DEVICE, RETICLE METHOD FOR CHECKING POSITION MISALIGNMENT AND METHOD FOR MANUFACTURING POSITION MISALIGNMENT CHECKING MARK

Michiya Takimoto

Archive | 2010

Pattern generating method, method of manufacturing semiconductor device, and computer program product

Takafumi Taguchi; Toshiya Kotani; Michiya Takimoto; Fumiharu Nakajima; Ryota Aburada; Hiromitsu Mashita; Katsumi Iyanagi; Chikaaki Kodama

Archive | 2010

Method for determining exposure correction amount

Kazuhiro Takahata; Michiya Takimoto; 道也 瀧本; 和宏 高畑

Archive | 2010

SEMICONDUCTOR-DEVICE MANUFACTURING METHOD, COMPUTER PROGRAM PRODUCT, AND EXPOSURE-PARAMETER CREATING METHOD

Michiya Takimoto; Hiromitsu Mashita; Toshiya Kotani

Archive | 2009

Method of manufacturing semiconductor device, and program for forming exposure parameter

Toshiya Kotani; Hiromitsu Mashita; Michiya Takimoto; 敏也 小谷; 道也 瀧本; 浩充 間下

Archive | 2013

RECORDING MEDIUM, IMPRINT METHOD, AND IMPRINT APPARATUS

Michiya Takimoto

Archive | 2011

MASK PATTERN DETERMINING METHOD, MASK MANUFACTURING METHOD, AND DEVICE MANUFACTURING METHOD

Toshiya Kotani; Fumiharu Nakajima; Ryota Aburada; Takafumi Taguchi; Hiromitsu Mashita; Michiya Takimoto; Chikaaki Kodama

Archive | 2010

Pattern generating method, method of manufacturing semiconductor device, and recording medium

Takafumi Taguchi; Toshiya Kotani; Michiya Takimoto; Fumiharu Nakajima; Ryota Aburada; Hiromitsu Mashita; Katsumi Iyanagi; Chikaaki Kodama

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Toshiya Kotani

Toshiba

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Hiromitsu Mashita

Toshiba

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Takafumi Taguchi

Toshiba

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Chikaaki Kodama

Toshiba

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Fumiharu Nakajima

Toshiba

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Hidefumi Mukai

Toshiba

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Kazuya Fukuhara

Toshiba

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Ryota Aburada

Toshiba

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Katsumi Iyanagi

Toshiba

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Soichi Inoue

Dai Nippon Printing

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