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Ming-Sheng Yang

United Microelectronics Corporation

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Publication

Featured researches published by Ming-Sheng Yang.

Archive | 2002

Air gap for tungsten/aluminum plug applications

Water Lur; David Lee; Kuang-Chih Wang; Ming-Sheng Yang

Archive | 2002

Air gap for dual damascene applications

Water Lur; David Lee; Kuang-Chih Wang; Ming-Sheng Yang

Archive | 2005

Air gap formation method for reducing undesired capacitive coupling between interconnects in an integrated circuit device

Water Lur; David Lee; Kuang-Chih Wang; Ming-Sheng Yang

Archive | 2002

Air gap structure and formation method for reducing undesired capacitive coupling between interconnects in an integrated circuit device

Water Lur; David Lee; Kuang-Chih Wang; Ming-Sheng Yang

Archive | 2001

Method of improving surface planarity of chemical-mechanical polishing operation by forming shallow dummy

Ming-Sheng Yang; Yimin Huang; Juan-Yuan Wu; Water Lur

Archive | 1999

Method for improving non-uniformity of chemical mechanical polishing by over coating

Hsueh-Chung Chen; Ming-Sheng Yang; Juan-Yuan Wu; Water Lur

Archive | 1998

Post-CMP wafer clean process

Ming-Sheng Yang; Juan-Yuan Wu; Water Lur

Archive | 1998

Method of planarization

Ming-Sheng Yang; Kuen-Jian Chen; Juan-Yuan Wu; Water Lur

Archive | 2004

Chemical mechanical polishing in forming semiconductor device

Ming-Sheng Yang; Juan-Yuan Wu; Water Lur

Archive | 1997

Chemical mechanical polishing methods using low pH slurry mixtures

Ming-Sheng Yang; Juan-Yuan Wu; Water Lur; Shih-Wei Sun

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Collaboration

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Water Lur

United Microelectronics Corporation

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Juan-Yuan Wu

United Microelectronics Corporation

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David Lee

United Microelectronics Corporation

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Kuang-Chih Wang

United Microelectronics Corporation

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Shih-Wei Sun

United Microelectronics Corporation

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Hsueh-Chung Chen

United Microelectronics Corporation

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Kuen-Jian Chen

United Microelectronics Corporation

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Yimin Huang

United Microelectronics Corporation

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