Juan-Yuan Wu

Multi-step high density plasma chemical vapor deposition process

Method of gap filling

High density plasma chemical vapor deposition process

Chemical mechanical polishing for forming a shallow trench isolation structure

Method of fabricating dual damascene structure

Apparatus for controlling uniformity of polished material

Structure of an antenna effect monitor

Chemical-mechanical polishing station with end-point monitoring device

Physical vapor deposition device for forming a uniform metal layer on a semiconductor wafer

Method of improving surface planarity of chemical-mechanical polishing operation by forming shallow dummy