Lars Tebje

Triaxial acceleration sensor

Micromechanical component and method for manufacturing a micromechanical component

Micromechanical z-sensor

Acceleration sensor, has micromechanical functional part arranged over substrate, where functional part is fastened to substrate by two torsion springs over common hanging part that is fastened to substrate by two anchors

Micromechanical acceleration sensor having an open seismic mass

Acceleration sensor and method for its manufacture

Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component

Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure

Micromechanical system including a suspension and an electrode positioned movably

Micromechanical component i.e. acceleration sensor, for use in automotive industry, has insulating layer comprising hole structure with recesses in region, which is extended below electrode of conductive layer