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Lars Tebje

Bosch

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Publication

Featured researches published by Lars Tebje.

Archive | 2009

Triaxial acceleration sensor

Johannes Classen; Lars Tebje

Archive | 2012

Micromechanical component and method for manufacturing a micromechanical component

Johannes Classen; Arnd Kaelberer; Lars Tebje

Archive | 2007

Micromechanical z-sensor

Johannes Classen; Lars Tebje

Archive | 2007

Acceleration sensor, has micromechanical functional part arranged over substrate, where functional part is fastened to substrate by two torsion springs over common hanging part that is fastened to substrate by two anchors

Johannes Classen; Jochen Franz; Lars Tebje

Archive | 2009

Micromechanical acceleration sensor having an open seismic mass

Heiko Stahl; Dietrich Schubert; Lars Tebje

Archive | 2009

Acceleration sensor and method for its manufacture

Johannes Classen; Arnd Kaelberer; Patrick Wellner; Dietrich Schubert; Lars Tebje

Archive | 2015

Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component

Friedjof Heuck; Lars Tebje; Heiko Stahl; Jullian Gonska; Reinhard Neul

Archive | 2015

Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure

Friedjof Heuck; Ralf Reichenbach; Daniel Christoph Meisel; Lars Tebje; Mirko Hattass; Jochen Reinmuth; Torsten Kramer; Johannes Classen; Reinhard Neul; Antoine Puygranier

Archive | 2011

Micromechanical system including a suspension and an electrode positioned movably

Johannes Classen; Arnd Kaelberer; Patrick Wellner; Dietrich Schubert; Lars Tebje

Archive | 2010

Micromechanical component i.e. acceleration sensor, for use in automotive industry, has insulating layer comprising hole structure with recesses in region, which is extended below electrode of conductive layer

Arnd Kaelberer; Dietrich Schubert; Lars Tebje; Ralf Schellin

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Collaboration

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Johannes Classen

Bosch

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Arnd Kaelberer

Bosch

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Patrick Wellner

Bosch

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Dietrich Schubert

Bosch

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Daniel Christoph Meisel

Bosch

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Mirko Hattass

Bosch

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Friedjof Heuck

Bosch

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Reinhard Neul

Bosch

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Antoine Puygranier

Bosch

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Jochen Reinmuth

Bosch

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