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Mirko Vukovic

Tokyo Electron

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Publication

Featured researches published by Mirko Vukovic.

Archive | 1999

Method and apparatus for ionized physical vapor deposition

John Drewery; Glyn Reynolds; Derrek Andrew Russell; Jozef Brcka; Mirko Vukovic; Michael Grapperhaus; Frank M. Cerio; Bruce Gittleman

Archive | 2009

GAS DISTRIBUTION SYSTEM AND METHOD FOR DISTRIBUTING PROCESS GAS IN A PROCESSING SYSTEM

Mirko Vukovic

Archive | 2001

Inductively-coupled plasma processing system

Jozef Brcka; John Drewery; Michael Grapperhaus; Gerrit J. Leusink; Glyn Reynolds; Mirko Vukovic; Tugrul Yasar

Archive | 2001

Immersed inductively—coupled plasma source

Jozef Brcka; John Drewery; Michael Grapperhaus; Gerrit J. Leusink; Glyn Reynolds; Mirko Vukovic; Tugrul Yasar

Archive | 2002

Process apparatus and method for improving plasma production of an inductively coupled plasma

Mirko Vukovic; Edward L. Sill

Archive | 2005

Method and system for measuring a flow rate in a solid precursor delivery system

Mirko Vukovic

Archive | 2001

Ionized physical vapor deposition method and apparatus with magnetic bucket and concentric plasma and material source

Mirko Vukovic

Archive | 2010

Internal antennae for plasma processing with metal plasma

Mirko Vukovic

Archive | 2006

Magnetically enhanced capacitive plasma source for ionized physical vapor deposition

Mirko Vukovic; Derrek Andrew Russell

Archive | 2007

INTERNAL COIL WITH SEGMENTED SHIELD AND INDUCTIVELY-COUPLED PLASMA SOURCE AND PROCESSING SYSTEM THEREWITH

Mirko Vukovic

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Collaboration

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Glyn Reynolds

Tokyo Electron

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John Drewery

Tokyo Electron

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Jozef Brcka

Tokyo Electron

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Michael Grapperhaus

Tokyo Electron

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Derrek Andrew Russell

Tokyo Electron

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Gerrit J. Leusink

Tokyo Electron

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Ronald Nasman

Tokyo Electron

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Tugrul Yasar

Tokyo Electron

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Frank M. Cerio

Tokyo Electron

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James Grootegoed

Tokyo Electron

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