Tugrul Yasar | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Tugrul Yasar is active.

Explore More

Publication

Featured researches published by Tugrul Yasar.

Archive | 1999

Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a cvd chamber

Joseph T. Hillman; Tugrul Yasar; Kenichi Kubo; Vincent Vezin; Hideaki Yamasaki; Yasuhiko Kojima; Yumiko Kawano; Hideki Yoshikawa

Archive | 2001

Inductively-coupled plasma processing system

Jozef Brcka; John Drewery; Michael Grapperhaus; Gerrit J. Leusink; Glyn Reynolds; Mirko Vukovic; Tugrul Yasar

Archive | 2001

Immersed inductively—coupled plasma source

Jozef Brcka; John Drewery; Michael Grapperhaus; Gerrit J. Leusink; Glyn Reynolds; Mirko Vukovic; Tugrul Yasar

Archive | 1995

Process equipment with simultaneous or sequential deposition and etching capabilities

Tugrul Yasar; Ira Reiss; Subhadra Gupta; Rajendrapura Seetharamaiya Krishnaswamy; Israel Wagner

Archive | 1998

Apparatus and method for electrically isolating an electrode in a PECVD process chamber

Gerrit J. Leusink; Michael Ward; Tayler Bao; Jerry Yeh; Joseph T. Hillman; Tugrul Yasar

Archive | 1998

Method of passivating and stabilizing a Ti-PECVD process chamber and combined Ti-PECVD/TiN-CVD processing method and apparatus

Michael S. Ameen; Joseph T. Hillman; Gert J. Leusink; Michael Ward; Tugrul Yasar

Archive | 2001

Redistribution of copper deposited films

Chantal J. Arena-Foster; Robert F. Foster; Joseph T. Hillman; Thomas J. Licata; Tugrul Yasar

Archive | 2000

Method for enhancing the adhesion of a barrier layer to a dielectric

Joseph T. Hillman; Tugrul Yasar; Richard C. Westhoff

Archive | 2002

Immersion type inductively-coupled plasma source

Jozef Brcka; John Drewery; Michael Grapperhaus; Gerrit J. Leusink; Glyn Reynolds; Mirko Vukovic; Tugrul Yasar; レイノルズグリン; ブルッカジョーゼフ; ドリュワリージョン; ヤサールツグラル; リューシンクヘリット; グラッパーハウマイケル; ヴコヴィッチミルコ

Archive | 2001