Mohith Verghese
ASM International
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Publication
Featured researches published by Mohith Verghese.
218th ECS Meeting | 2010
Annalisa Del Vitto; R. Piagge; Enrica Ravizza; Simona Spadoni; Alessandro Sebastiani; C. Scozzari; C. Wiemer; G. Ghidini; Mauro Alessandri; M. Fanciulli; Jan Maes; Mohith Verghese
In this paper, a study of a La-based high-k oxide to be employed as blocking oxide in future non-volatile scaled memory devices is presented. Hf1-xLaxOy deposited by atomic layer deposition is considered. In order to allow the integration of this material, its chemical interaction with an Al2O3 cap layer has been studied. Moreover, the electrical characteristics have been evaluated after integration in capacitor structures. The rare earth-based ternary oxide presents promising characteristics to be a good candidate as active dielectric for non volatile memory devices.
Archive | 2006
Mohith Verghese; Eric Shero
Archive | 2006
Eric Shero; Mohith Verghese
Archive | 2007
Kyle Fondurulia; Eric Shero; Mohith Verghese; Carl White
Archive | 2003
Marko Tuominen; Eric Shero; Mohith Verghese
Archive | 2008
Marko Tuominen; Eric Shero; Mohith Verghese
Archive | 2009
Kyle Fondurulia; Eric Shero; Mohith Verghese; Carl White
Archive | 2014
Petri Raisanen; Michael Givens; Mohith Verghese
Archive | 2010
Eric Shero; Mohith Verghese; Carl White; Herbert Terhorst; Dan Maurice
Archive | 2004
Ryan M. Schmidt; Mohith Verghese
