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Moritz Becker

Carl Zeiss AG

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Publication

Featured researches published by Moritz Becker.

Archive | 2012

Device for generating gas curtain for deflecting contaminating substances in extreme UV-mask metrological system, has nozzle with nozzle section, where pressure of supersonic-gas flow is not larger than specific percent of ambient pressure

Dirk Heinrich Ehm; Moritz Becker; Peter Marek; Ernst Galutschek; Alireza Akbarinia; Alexander Sauerhoefer; Jens Kugler; Stefan Hembacher

Archive | 2015

Reflektives optisches Element

Dirk Heinrich Ehm; Moritz Becker; Irene Ament; Blanckenhagen Gisela Von; Jörn Weber

Archive | 2014

Euv lithography system and transport device for transporting a reflective optical element

Moritz Becker; Dirk Heinrich Ehm; Peter Marek; Akbarinia Alireza

Archive | 2015

Optische Anordnung, insbesondere Plasma-Lichtquelle oder EUV-Lithographieanlage

Moritz Becker; Ulrich Müller; Oliver Arp

Archive | 2011

Optical arrangement, particularly projection exposure system for extreme ultraviolet lithography, has optical element with reflective coating, which has cover layer, on whose surface oxidic impurities are present

Moritz Becker; Dirk Heinrich Ehm; Stefan-Wolfgang Schmidt

Archive | 2017

REFLECTIVE OPTICAL ELEMENT

Dirk Heinrich Ehm; Moritz Becker; Irene Ament; Gisela von Blanckenhagen; Joern Weber

Archive | 2016

Verfahren zum Betreiben einer EUV-Lithographieanlage Method for operating an EUV lithography apparatus

Moritz Becker; Stefan-Wolfgang Schmidt

Archive | 2016

OPTICAL ARRANGEMENT, IN PARTICULAR PLASMA LIGHT SOURCE OR EUV LITHOGRAPHY SYSTEM

Moritz Becker; Ulrich Mueller; Oliver Arp

Archive | 2016

Method for operating an EUV lithography apparatus

Moritz Becker; Stefan-Wolfgang Schmidt

Archive | 2015

Optische Anordnung für die EUV-Lithographie

Moritz Becker; Stefan-Wolfgang Schmidt; Dirk Heinrich Ehm; Edwin te Sligte

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Collaboration

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Dirk Heinrich Ehm

Carl Zeiss AG

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Stefan-Wolfgang Schmidt

Carl Zeiss AG

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Peter Marek

Carl Zeiss AG

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Alireza Akbarinia

Carl Zeiss AG

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Edwin te Sligte

Carl Zeiss AG

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Gisela von Blanckenhagen

Carl Zeiss AG

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Oliver Arp

Carl Zeiss AG

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Irene Ament

Carl Zeiss AG

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Ulrich Müller

Carl Zeiss AG

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Alexander Sauerhoefer

Carl Zeiss AG

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