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Moritz Haupt

Infineon Technologies

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Publication

Featured researches published by Moritz Haupt.

Archive | 2004

Void free, silicon filled trenches in semiconductors

Moritz Haupt

Archive | 2001

Method for manufacturing a trench capacitor

Gustav Beckmann; Moritz Haupt; Anke Krasemann; Alexandra Lamprecht; Dietmar Ottenwälder; Jens-Uwe Sachse; Martin Schrems

Archive | 2002

Method for fabricating an insulation collar in a trench capacitor

Martin Schrems; Anke Krasemann; Moritz Haupt; Sabine Steck; Daniel Köhler

Archive | 1999

Production of an insulating collar in a trench capacitor comprises forming a trench in the substrate, forming an insulating layer in the trench, filling with filler material

Martin Schreml; Anke Krasemann; Daniel Koehler; Moritz Haupt; Sabine Hennecke

Archive | 2004

Gap-filling for isolation

Andreas Klipp; Momtchil Stavrev; Moritz Haupt

Archive | 2005

Fabrication method for a semiconductor structure

Moritz Haupt; Andreas Klipp; Hans-Peter Sperlich; Momtchill Stavrev; Stephan Wege

Archive | 2000

Production of a trench capacitor comprises filling a trench with a filler, forming an insulating collar, removing the filler, forming a trenched plate using low pressure gas phase doping, etc.

Moritz Haupt; Jens-Uwe Sachse; Gustav Beckmann; Alexandra Lamprecht; Dietmar Ottenwaelder; Anke Krasemann; Martin Schrems

Archive | 2005

Method for N+ doping of amorphous silicon and polysilicon electrodes in deep trenches

Moritz Haupt

Archive | 2002

Method for improving a doping profile for gas phase doping

Moritz Haupt; Anja Morgenschweis; Dietmar Ottenwälder; Uwe Dr. Schröder

Archive | 2000

Method for producing an insulation collar in a trench capacitor

Moritz Haupt; Daniel Koehler; Anke Krasemann; Martin Schrems; Sabine Steck

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Collaboration

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Anke Krasemann

Infineon Technologies

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Martin Schrems

Siemens

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Anja Morgenschweis

Infineon Technologies

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Andreas Dietel

Infineon Technologies

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Daniel Koehler

Infineon Technologies

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Jochen Geidl

Infineon Technologies

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Matthias Förster

Infineon Technologies

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Michael Stadtmüller

Infineon Technologies

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Olaf Storbeck

Qimonda

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Sabine Steck

Infineon Technologies

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