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Nagraj Shankar

Lam Research

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Publication

Featured researches published by Nagraj Shankar.

Archive | 2014

High growth rate process for conformal aluminum nitride

Shankar Swaminathan; Ananda Banerji; Nagraj Shankar; Adrien Lavoie

Archive | 2015

SELECTIVE FORMATION OF DIELECTRIC BARRIERS FOR METAL INTERCONNECTS IN SEMICONDUCTOR DEVICES

Thomas W. Mountsier; Hui-Jung Wu; Bhadri N. Varadarajan; Nagraj Shankar; William T. Lee

Archive | 2014

METHODS AND APPARATUS FOR SELECTIVE DEPOSITION OF COBALT IN SEMICONDUCTOR PROCESSING

Thomas Joseph Knisley; Nagraj Shankar; Pramod Subramonium

Archive | 2013

METHOD AND APPARATUS FOR PURGING AND PLASMA SUPPRESSION IN A PROCESS CHAMBER

Patrick Breiling; Kevin Gerber; Jennifer O'Loughlin; Nagraj Shankar; Pramod Subramonium

Archive | 2012

Metal and silicon containing capping layers for interconnects

Jengyi Yu; Gengwei Jiang; Pramod Subramonium; Roey Shaviv; Hui-Jung Wu; Nagraj Shankar

Archive | 2014

LINER AND BARRIER APPLICATIONS FOR SUBTRACTIVE METAL INTEGRATION

Hui-Jung Wu; Thomas Joseph Knisley; Nagraj Shankar; Meihua Shen; John Hoang; Prithu Sharma

Archive | 2017

OXIDIZING TREATMENT OF ALUMINUM NITRIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING

Meliha Gozde Rainville; Nagraj Shankar; Daniel Damjanovic; Kapu Sirish Reddy

Archive | 2016

SACRIFICIAL PRE-METAL DIELECTRIC FOR SELF-ALIGNED CONTACT SCHEME

Thomas W. Mountsier; Bart van Schravendijk; Ananda Banerji; Nagraj Shankar

Archive | 2015

Methods for formation of low-k aluminum-containing etch stop films

Daniel Damjanovic; Pramod Subramonium; Nagraj Shankar

Archive | 2018

Deposition of aluminum oxide etch stop layers

Meliha Gozde Rainville; Nagraj Shankar; Kapu Sirish Reddy; Dennis M. Hausmann

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Pramod Subramonium

Lam Research

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Hui-Jung Wu

Lam Research

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Ananda Banerji

Lam Research

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Bart van Schravendijk

Lam Research

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Bhadri N. Varadarajan

Lam Research

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Daniel Damjanovic

Lam Research

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Kapu Sirish Reddy

Lam Research

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Meliha Gozde Rainville

Lam Research

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Thomas Joseph Knisley

Lam Research

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Thomas W. Mountsier

Lam Research

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