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Dive into the research topics where Thomas W. Mountsier is active.

Publication


Featured researches published by Thomas W. Mountsier.


Archive | 2011

Plasma activated conformal film deposition

Adrien Lavoie; Shankar Swaminathan; Hu Kang; Ramesh Chandrasekharan; Tom Dorsh; Dennis M. Hausmann; Jon Henri; Thomas Jewell; Ming Li; Bryan Schlief; Antonio Xavier; Thomas W. Mountsier; Bart van Schravendijk; Easwar Srinivasan; Mandyam Sriram


Archive | 1996

Chemical vapor deposition system including dedicated cleaning gas injection

Michael D. Kilgore; Wilbert van den Hoek; Christopher J. Rau; Bart van Schravendijk; Jeffrey A. Tobin; Thomas W. Mountsier; James C. Oswalt


Archive | 2007

Protection of Cu damascene interconnects by formation of a self-aligned buffer layer

Bart van Schravendijk; Thomas W. Mountsier; Mahesh Sanganeria; Glenn B Alers; Roey Shaviv


Archive | 2009

Diffusion barrier layers

Thomas W. Mountsier; Roey Shaviv; Steven T. Mayer; Ronald A. Powell


Archive | 2010

Multistep method of depositing metal seed layers

Robert Rozbicki; Bart van Schravendijk; Thomas W. Mountsier; Wen Wu


Archive | 2001

Apparatus and method for physical vapor deposition using an open top hollow cathode magnetron

Jeffrey A. Tobin; Jean Qing Lu; Thomas W. Mountsier; Hong Mei Zhang


Archive | 2002

Method for patterning multilevel interconnects

Stephan Lassig; S. M. Reza Sadjadi; Vinay Pohray; Si Yi Li; Thomas W. Mountsier; Chiu Chi


Archive | 2014

Pecvd films for euv lithography

Nader Shamma; Thomas W. Mountsier; Donald Schlosser


Archive | 2015

SELECTIVE FORMATION OF DIELECTRIC BARRIERS FOR METAL INTERCONNECTS IN SEMICONDUCTOR DEVICES

Thomas W. Mountsier; Hui-Jung Wu; Bhadri N. Varadarajan; Nagraj Shankar; William T. Lee


Archive | 2015

High aspect ratio etch with combination mask

Joydeep Guha; Sirish Reddy; Kaushik Chattopadhyay; Thomas W. Mountsier; Aaron Eppler; Thorsten Lill; Vahid Vahedi; Harmeet Singh

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Roey Shaviv

University of Illinois at Chicago

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Steven T. Mayer

Lawrence Livermore National Laboratory

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David T. Read

National Institute of Standards and Technology

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