Nam-Jung Kang
Samsung
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Publication
Featured researches published by Nam-Jung Kang.
Proceedings of SPIE | 2016
Minyoung Shim; Seoksan Kim; Sungmin Park; Seiryung Choi; Nam-Jung Kang; Hyunju Sung; Jinwoo Choi; Jae-pil Shin; Jaekyun Park; Myoungseob Shim; Hyeong-Sun Hong; K. Y. Lee
Memory industry has been pursuing endless shrinking technology which increases fabrication complexity. It poses problems between adjacent layers as well as within a single layer. To verify the interlayer design, we have developed the interlayer design verification methodology using contour image. Our methodology makes it possible to verify interlayer design visually by extracting the contour image from the real patterns. And we can verify interlayer design even during the fabrication process and conduct a non-destructive inspection. Also this methodology provides a statistical analysis of massive measured data. Through this methodology, we can calculate the margin of current interlayer design and suggest the requirement of design.
Archive | 2008
Seong-Goo Kim; Hyeong-Sun Hong; Dong-Hyun Kim; Nam-Jung Kang
Archive | 2008
Nam-Jung Kang; Dong-Soo Woo; Hyeong-Sun Hong; Dong-Hyun Kim
Archive | 2008
Gil-sub Kim; Yong-Il Kim; Jong-seop Lee; Jai-kyun Park; Yun-Sung Lee; Nam-Jung Kang
Archive | 2010
Yong-Il Kim; Dae-Ik Kim; Yun-Sung Lee; Nam-Jung Kang
Archive | 2008
Seong-Goo Kim; Hyeong-Sun Hong; Dong-Hyun Kim; Nam-Jung Kang
Archive | 2007
Hyeong-Sun Hong; Jae-Goo Lee; Dong-Hyun Kim; Sung-Un Kwon; Sang-Joon Park; Nam-Jung Kang
Archive | 2010
Seong-Goo Kim; Hyeong-Sun Hong; Dong-Hyun Kim; Nam-Jung Kang
Archive | 2009
Nam-Jung Kang; Jae Hoon Song; So-hyun Ryu; Dong-Kwan Yang
Archive | 2008
Nam-Jung Kang; Dong-Soo Woo; Hyeong-Sun Hong; Dong-Hyun Kim