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Dive into the research topics where Nam-Jung Kang is active.

Publication


Featured researches published by Nam-Jung Kang.


Proceedings of SPIE | 2016

Interlayer design verification methodology using contour image

Minyoung Shim; Seoksan Kim; Sungmin Park; Seiryung Choi; Nam-Jung Kang; Hyunju Sung; Jinwoo Choi; Jae-pil Shin; Jaekyun Park; Myoungseob Shim; Hyeong-Sun Hong; K. Y. Lee

Memory industry has been pursuing endless shrinking technology which increases fabrication complexity. It poses problems between adjacent layers as well as within a single layer. To verify the interlayer design, we have developed the interlayer design verification methodology using contour image. Our methodology makes it possible to verify interlayer design visually by extracting the contour image from the real patterns. And we can verify interlayer design even during the fabrication process and conduct a non-destructive inspection. Also this methodology provides a statistical analysis of massive measured data. Through this methodology, we can calculate the margin of current interlayer design and suggest the requirement of design.


Archive | 2008

Contact structures and semiconductor devices including the same and methods of forming the same

Seong-Goo Kim; Hyeong-Sun Hong; Dong-Hyun Kim; Nam-Jung Kang


Archive | 2008

Method of Fabricating Semiconductor Device Having Self-Aligned Contact Plug and Related Device

Nam-Jung Kang; Dong-Soo Woo; Hyeong-Sun Hong; Dong-Hyun Kim


Archive | 2008

Methods of manufacturing semiconductor device having recess channel array transistor

Gil-sub Kim; Yong-Il Kim; Jong-seop Lee; Jai-kyun Park; Yun-Sung Lee; Nam-Jung Kang


Archive | 2010

Methods of manufacturing capacitor structures and methods of manufacturing semiconductor devices using the same

Yong-Il Kim; Dae-Ik Kim; Yun-Sung Lee; Nam-Jung Kang


Archive | 2008

Methods of forming contact structures semiconductor devices

Seong-Goo Kim; Hyeong-Sun Hong; Dong-Hyun Kim; Nam-Jung Kang


Archive | 2007

SEMICONDUCTOR DEVICE HAVING CONTACT BARRIER AND METHOD OF MANUFACTURING THE SAME

Hyeong-Sun Hong; Jae-Goo Lee; Dong-Hyun Kim; Sung-Un Kwon; Sang-Joon Park; Nam-Jung Kang


Archive | 2010

Contact structures and semiconductor devices including the same

Seong-Goo Kim; Hyeong-Sun Hong; Dong-Hyun Kim; Nam-Jung Kang


Archive | 2009

Method of forming a contact hole and method of manufacturing a semiconductor device having the same

Nam-Jung Kang; Jae Hoon Song; So-hyun Ryu; Dong-Kwan Yang


Archive | 2008

Method of fabricating semiconductor device having self-aligned contact plug

Nam-Jung Kang; Dong-Soo Woo; Hyeong-Sun Hong; Dong-Hyun Kim

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