Naoki Fukuda
Hitachi
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Publication
Featured researches published by Naoki Fukuda.
international reliability physics symposium | 1995
Naoki Fukuda; Tatsuyuki Saito; Yukihiro Suzuki; Tsuyoshi Fujiwara; Hizuru Yamaguchi; Nobuo Owada
This paper reports a new open failure observed in high aspect ratio contacts and vias filled with blanket tungsten CVD film. This failure mode has been proved to be induced by the poor film quality of the sputtered glue layer at the bottom of a hole. Open failure in contacts has been suppressed by lowering the deposition temperature of the sputtered glue layer together with the optimization of CVD process conditions. Open failure in vias has been suppressed by collimation sputtering of the glue layer at low temperature.
Archive | 1998
Yoshitaka Nakamura; Tsuyoshi Tamaru; Naoki Fukuda; Hidekazu Goto; Isamu Asano; Hideo Aoki; Keizo Kawakita; Satoru Yamada; Katsuhiko Tanaka; Hiroshi Sakuma; Masayoshi Hirasawa
Archive | 2003
Yoshitaka Nakamura; Tsuyoshi Tamaru; Naoki Fukuda; Hidekazu Goto; Isamu Asano; Hideo Aoki; Keizo Kawakita; Satoru Yamada; Katsuhiko Tanaka; Hiroshi Sakuma; Masayoshi Hirasawa
Archive | 2001
Masayoshi Saito; Yoshitaka Nakamura; Hidekazu Goto; Keizo Kawakita; Satoru Yamada; Toshihiro Sekiguchi; Isamu Asano; Yoshitaka Tadaki; Takuya Fukuda; Masayuki Suzuki; Tsuyoshi Tamaru; Naoki Fukuda; Hideo Aoki; Masayoshi Hirasawa
Archive | 1997
Naoki Fukuda; Tadashi Ohashi; Nobuo Owada; Tatsuyuki Saito; Hide Yamaguchi; 伸郎 大和田; 直史 大橋; 日出 山口; 直樹 福田; 達之 齋藤
Archive | 2003
Yoshitaka Nakamura; Hideo Aoki; Yoshikazu Ohira; Tadashi Umezawa; Satoru Yamada; Keizou Kawakita; Isamu Asano; Naoki Fukuda; Tsuyoshi Tamaru; Hidekazu Goto; Nobuyoshi Kobayashi
Archive | 1999
Naoki Fukuda; Hiroshi Ishiguro; 博 石黒; 直樹 福田
Archive | 2002
Naoki Fukuda; Yuji Shimomura; 祐二 下村; 直樹 福田
Archive | 2014
裕司 安達; Yuji Adachi; 福田 直樹; Naoki Fukuda; 直樹 福田
Archive | 2013
Sunao Onishi; 直 大西; Naoki Fukuda; 直樹 福田
