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Yushin Takasawa

Hitachi

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Publication

Featured researches published by Yushin Takasawa.

Archive | 2015

Method of manufacturing semiconductor device and substrate processing apparatus

Yushin Takasawa; Hajime Karasawa; Yoshiro Hirose

Archive | 2011

Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus

Yoshiro Hirose; Yushin Takasawa; Tsukasa Kamakura; Yoshinobu Nakamura; Ryota Sasajima

Archive | 2011

Process for production of semiconductor device, method for treatment of substrate, and device for treatment of substrate

義朗 ▲ひろせ▼; Yoshiro Hirose; Kenji Kanayama; 健司 金山; Norikazu Mizuno; 水野 謙和; Yushin Takasawa; 高澤 裕真; Yosuke Ota; 太田 陽介

Archive | 2001

Semiconductor device manufacturing method and semiconductor manufacturing apparatus

Yushin Takasawa; Hajime Karasawa

Archive | 2001

Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus

Hisashi Nomura; Yushin Takasawa; Hajime Karasawa; Yoshinori Imai; Tadanori Yoshida; Kenichi Yamaguchi

Archive | 2009

Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements

Yushin Takasawa; Hajime Karasawa; Yoshiro Hirose

Archive | 2009

Method of forming an insulation film having low impurity concentrations

Naonori Akae; Yoshiro Hirose; Yushin Takasawa; Yosuke Ota

Archive | 2016

Method and Apparatus of Manufacturing a Semiconductor Device by Forming a Film on a Substrate

Yushin Takasawa; Hajime Karasawa; Yoshiro Hirose

Archive | 2012

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATAUS

Naonori Akae; Yoshiro Hirose; Yushin Takasawa; Yosuke Ota

Archive | 2009

Method of producing semiconductor device, and substrate processing apparatus

Naonori Akae; Yushin Takasawa

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Collaboration

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Yoshiro Hirose

Hitachi

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Hajime Karasawa

Hitachi

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Naonori Akae

Hitachi

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Yosuke Ota

Hitachi

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Kenji Kameda

Hitachi

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Kiyohiko Maeda

Hitachi

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Ryota Sasajima

Hitachi

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Sadao Nakashima

Hitachi

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Takahiro Maeda

Hitachi

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Yoshinobu Nakamura

Hitachi

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