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Dive into the research topics where Nicolaus Ulbrich is active.

Publication


Featured researches published by Nicolaus Ulbrich.


Archive | 2013

THERMOPILE SENSOR AND METHOD OF MANUFACTURING SAME

Nicolaus Ulbrich


Archive | 2005

Micropump manufacturing method for use in e.g. medical technology, involves providing inner structures of micropump on substrate, where substrate and glasses are anodically bonded to each other in region of inner structures

Matthias Fürtsch; Rainer Straub; Nicolaus Ulbrich


Archive | 2009

Sensor element to spectroscopically measure infrared radiation, comprises substrate, membrane formed on substrate upper side, cavity formed below the membrane in the substrate, thermopile structure, filtering device, and thermopile cells

Nicolaus Ulbrich


Archive | 2006

Verfahren zum Bilden eines Grabens in einer Mikrostruktur

Frank Fischer; Helmut Baumann; Lars Metzger; Christoph Duenn; Volker Schmitz; Nicolaus Ulbrich


Archive | 2009

MICROMECHANICAL INFRARED SENSOR AND EVALUATION CONCEPT

Sebastian Guenther; Nicolaus Ulbrich; Volker Materna


Archive | 2006

Micromechanical component having an anodically bonded cap and a manufacturing method

Heiko Stahl; Nicolaus Ulbrich; Rainer Straub


Archive | 2005

Method for producing a trench in a microstructure

Frank Fischer; Helmut Baumann; Lars Metzger; Christoph Duenn; Volker Schmitz; Nicolaus Ulbrich


Archive | 2013

Mikromechanisches Sensorelement und Sensoreinrichtung mit einem derartigen Sensorelement

Frank Schäfer; Nicolaus Ulbrich; Harald Emmerich


Archive | 2013

Micromechanical sensor element and sensor device having this type of sensor element

Frank Schaefer; Nicolaus Ulbrich; Harald Emmerich


Archive | 2013

Micromechanical acceleration sensor for low frequency applications, has movable element which is connected with substrate by spring element, where thermo element is firmly connected with substrate

Uwe Schiller; Nicolaus Ulbrich

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