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Nirmal Chaudhary

Infineon Technologies

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Publication

Featured researches published by Nirmal Chaudhary.

IEEE Transactions on Device and Materials Reliability | 2007

ESD Evaluation of the Emerging MuGFET Technology

Christian Russ; Harald Gossner; Thomas Schulz; Nirmal Chaudhary; Weize Xiong; Andrew Marshall; Charvaka Duvvury; Klaus Schrüfer; C. Rinn Cleavelin

ESD characteristics of fully depleted (FD) FinFET devices are presented and compared to planar structures manufactured in the same multiple-gate FET (MuGFET) technology. FinFET-type MOS devices in breakdown mode are found to show an unprecedented sensitivity to ESD stress, while planar devices and FinFET gated diodes perform reasonably and with I-V characteristics beneficial for ESD protection.

Archive | 2005

Transistor with Dopant-Bearing Metal in Source and Drain

Hong-Jyh Li; Nirmal Chaudhary

Archive | 2000

Dry process for cleaning residues/polymers after metal etch

Nirmal Chaudhary; Xian J. Ning; George Stojakovic

Archive | 2001

Self-aligned STI process using nitride hard mask

John Pohl; Nirmal Chaudhary; Veit Klee; Tobias Mono; Paul Schroeder

Archive | 1997

Methods for performing planarization and recess etches and apparatus therefor

Nirmal Chaudhary

Archive | 2006

Electronic circuit, electronic circuit arrangement and method for producing an electronic circuit

Nirmal Chaudhary; Christian Russ; Thomas Schulz

Archive | 2001

Method of etching a contact by RIE using a low temperature carbon rich oxy-nitride layer for improving etching selectivity

Nirmal Chaudhary; Richard A. Conti

Archive | 2005

Electronic circuit, circuit arrangement and production process with multi-gate functional FET and protective FET having a charge-reducing transistor and a low trigger voltage

Nirmal Chaudhary; Christian Russ; Thomas Schulz

Archive | 2005

Transistor mit Dotierstoff tragendem Metall im Source- und Drainbereich

Nirmal Chaudhary; Hong-Jyh Austin Li

Archive | 2005

Elektronischer Schaltkreis, elektronische Schaltkreis-Anordnung und Verfahren zum Herstellen eines elektronischen Schaltkreises

Nirmal Chaudhary; Christian Russ; Thomas Schulz

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Christian Russ

Infineon Technologies

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Hong-Jyh Li

Infineon Technologies

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John Pohl

Infineon Technologies

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Paul Schroeder

Infineon Technologies

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Thomas Schulz

Intel Mobile Communications

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Tobias Mono

Infineon Technologies

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Veit Klee

Infineon Technologies

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Thomas Schulz

Intel Mobile Communications

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George Stojakovic

Infineon Technologies

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Hong-Jyh Austin Li

Infineon Technologies

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