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Dive into the research topics where Veit Klee is active.

Publication


Featured researches published by Veit Klee.


Archive | 2004

Method of making fully silicided gate electrode

Veit Klee; Sun-OO Kim


Archive | 2001

Resolution enhancement for alternating phase shift masks

Uwe Schroeder; Tobias Mono; Veit Klee


Archive | 2010

Method of making a contact in a semiconductor device

Veit Klee; Roman Knoefler; Uwe Schroeder


Archive | 2001

Self-aligned STI process using nitride hard mask

John Pohl; Nirmal Chaudhary; Veit Klee; Tobias Mono; Paul Schroeder


Archive | 2003

Dummy patterns for reducing proximity effects and method of using same

Tobias Mono; Veit Klee; Paul Wensley; Martin Commons


Archive | 2001

Strap resistance using selective oxidation to cap DT poly before STI etch

Paul Wensley; Martin Commons; Tobias Mono; Veit Klee


Archive | 2006

Verfahren zum Ausbilden einer Halbleiteranordnung A method of forming a semiconductor device

Veit Klee; Roman Knoefler; Uwe Schroeder


Archive | 2005

Verfahren zum Herstellen einer vollständig silizidierten Gateelektrode A method for producing a fully silicided gate electrode

Sun-OO Kim; Veit Klee


Archive | 2005

Verfahren zum Ausbilden eines Halbleiterbauelements mit einer vollständig silizidierten Gateelektrode (FUSI) sowie integrierter Schaltungschip A method of forming a semiconductor device with a fully silicided gate electrode (FUSI) and integrated circuit chip

Sun-OO Kim; Veit Klee


Archive | 2005

Verfahren zum Herstellen einer vollständig silizidierten Gateelektrode eines Halbleiterbauelements A method for producing a fully silicided gate electrode of a semiconductor device

Sun-OO Kim; Veit Klee

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John Pohl

Infineon Technologies

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