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Noel M. Russell

Texas Instruments

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Publication

Featured researches published by Noel M. Russell.

Archive | 2004

Dual damascene diffusion barrier/liner process with selective via-to-trench-bottom recess

Satyavolu Srinivas Papa Rao; Stephan Grunow; Noel M. Russell

Archive | 2004

Contact resistance reduction by new barrier stack process

Duofeng Yue; Stephan Grunow; Satyavolu Srinivas Papa Rao; Noel M. Russell; Montray Leavy

Archive | 1998

PVD deposition process for CVD aluminum liner processing

Anthony J. Konecni; Noel M. Russell

Archive | 2003

Methods and semiconductor devices with wiring layer fill structures to improve planarization uniformity

Christopher L. Borst; Alwin J. Tsao; Bobby D. Strong; Noel M. Russell

Archive | 2004

Partial plate anneal plate process for deposition of conductive fill material

Montray Leavy; Stephan Grunow; Satyavolu Srinivas Papa Rao; Noel M. Russell

Archive | 2004

Method of fabricating robust nucleation/seed layers for subsequent deposition/fill of metallization layers

Stephan Grunow; Satyavolu Srinivas Papa Rao; Noel M. Russell

Archive | 2004

Metal-halogen physical vapor deposition for semiconductor device defect reduction

Peijun J. Chen; Duofeng Yue; Douglas E. Mercer; Noel M. Russell

Archive | 2003

Measurement of wafer temperature in semiconductor processing chambers

Satyavolu Srinivas Papa Rao; Stephan Grunow; Noel M. Russell

Archive | 2003

Stacked interconnect structure between copper lines of a semiconductor circuit

Stephan Grunow; Satyavolu Srinivas Papa Rao; Noel M. Russell

Archive | 2008

Metal-germanium physical vapor deposition for semiconductor device defect reduction

Doufeng Yue; Noel M. Russell; Peijun J. Chen; Douglas E. Mercer

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Collaboration

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Satyavolu Srinivas Papa Rao

Texas Instruments

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Stephan Grunow

Texas Instruments

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Richard A. Faust

Texas Instruments

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Li Chen

Texas Instruments

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Christopher L. Borst

Texas Instruments

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Duofeng Yue

Texas Instruments

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Peijun J. Chen

Texas Instruments

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Alwin J. Tsao

Texas Instruments

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Anthony J. Konecni

Texas Instruments

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Bobby D. Strong

Texas Instruments

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