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Satyavolu Srinivas Papa Rao

Texas Instruments

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Publication

Featured researches published by Satyavolu Srinivas Papa Rao.

Archive | 2003

MIM capacitors and methods for fabricating same

Satyavolu Srinivas Papa Rao; Asad M. Haider; Kelly J. Taylor; Ed Burke

Archive | 2004

Dual damascene diffusion barrier/liner process with selective via-to-trench-bottom recess

Satyavolu Srinivas Papa Rao; Stephan Grunow; Noel M. Russell

Archive | 2004

Contact resistance reduction by new barrier stack process

Duofeng Yue; Stephan Grunow; Satyavolu Srinivas Papa Rao; Noel M. Russell; Montray Leavy

Archive | 2008

Method to improve inductance with a high-permeability slotted plate core in an integrated circuit

Kenneth D. Brennan; Satyavolu Srinivas Papa Rao; Byron Williams

Archive | 2004

Use of supercritical fluid for low effective dielectric constant metallization

Satyavolu Srinivas Papa Rao; Stephan Grunow; Phillip D. Matz

Archive | 2008

Systems and methods that selectively modify liner induced stress

Ting Y. Tsui; Satyavolu Srinivas Papa Rao; Haowen Bu; Robert Kraft

Archive | 2005

Integration of pore sealing liner into dual-damascene methods and devices

Edward Raymond Engbrecht; Satyavolu Srinivas Papa Rao; Sameer Kumar Ajmera; Stephan Grunow

Archive | 2004

Metal insulator metal (MIM) capacitor fabrication with sidewall spacers and aluminum cap (ALCAP) top electrode

Darius L. Crenshaw; Byron Williams; Alwin J. Tsao; H. Shichijo; Satyavolu Srinivas Papa Rao; Kenneth D. Brennan; Steven Alan Lytle

Archive | 2004

Partial plate anneal plate process for deposition of conductive fill material

Montray Leavy; Stephan Grunow; Satyavolu Srinivas Papa Rao; Noel M. Russell

Archive | 2003

Capacitor integration at top-metal level with a protection layer for the copper surface

Satyavolu Srinivas Papa Rao; Timothy A. Rost; Edmund Burke

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Stephan Grunow

Texas Instruments

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Noel M. Russell

Texas Instruments

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Phillip D. Matz

Texas Instruments

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Sanjeev Aggarwal

Texas Instruments

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Edmund Burke

Texas Instruments

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Kenneth D. Brennan

Texas Instruments

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Lindsey H. Hall

Texas Instruments

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Sameer Kumar Ajmera

Texas Instruments

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Timothy A. Rost

Texas Instruments

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Basab Chatterjee

Texas Instruments

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