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Numanami Tsuneo

Shin-Etsu Chemical

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Publication

Featured researches published by Numanami Tsuneo.

Archive | 2004

METHOD FOR DRYING QUARTZ SUBSTRATE, AND THE QUARTZ SUBSTRATE

Nakatsu Masayuki; Moriya Jiro; Tajika Atsushi; Numanami Tsuneo

Archive | 2005

Substrat für Fotomaskenrohling, Fotomaskenrohling und Fotomaske

Nakatsu Masayuki; Numanami Tsuneo; Mogi Masayuki; Itoh Masamitsu; Hagiwara Tsuneyuki; Kondo Naoto

Archive | 2006

GUIDE RING FOR POLISHING RECTANGULAR SUBSTRATE, POLISHING HEAD, AND METHOD FOR POLISHING RECTANGULAR SUBSTRATE

Nakatsu Masayuki; Numanami Tsuneo

Archive | 2004

Drying method for quartz substrate, and quartz substrate

Nakatsu Masayuki; Moriya Jiro; Tajika Atsushi; Numanami Tsuneo

Archive | 2003

Phase shift mask blank, phase shift mask, and manufacturing method thereof

Inazuki Yukio; Nakatsu Masayuki; Numanami Tsuneo; Tajika Atsushi; Kaneko Hideo

Archive | 2017

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD FOR USING IN A PHOTOMASK-RELATED SUBSTRATE

Numanami Tsuneo; Inazuki Yukio; Sakurada Toyohisa

Archive | 2007

Methode zur Herstellung eines Rohlings für eine Phasenschiebermaske und einer Phasenschiebermaske

Inazuki Yukio; Nakatsu Masayuki; Numanami Tsuneo; Tajika Atsushi; Kaneko Hideo; Okazaki Satoshi

Archive | 2007

Method of manufacture of a phase shift mask blank and of a phase shift mask

Inazuki Yukio; Nakatsu Masayuki; Numanami Tsuneo; Tajika Atsushi; Kaneko Hideo; Okazaki Satoshi

Archive | 2005

METHOD OF SELECTING PHOTOMASK BLANK SUBSTRATE FOR EXPOSING PATTERNS HAVING REDUCED MINIMUM FEATURE SIZE TO HIGH ACCURACY ON WAFER SUBSTRATE

Hagiwara Tsuneyuki; Itoh Masamitsu; Kondo Naoto; Mogi Masayuki; Nakatsu Masayuki; Numanami Tsuneo

Archive | 2005

METHOD OF SELECTING PHOTOMASK BLANK SUBSTRATE FOR FORMING PHOTOMASK USED FOR EXPOSING PATTERNS HAVING REDUCED MINIMUM FEATURE SIZE

Hagiwara Tsuneyuki; Kondo Naoto; Mogi Masayuki; Nakatsu Masayuki; Numanami Tsuneo

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Collaboration

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Nakatsu Masayuki

Shin-Etsu Chemical

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Hagiwara Tsuneyuki

Shin-Etsu Chemical

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Mogi Masayuki

Shin-Etsu Chemical

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Kondo Naoto

Shin-Etsu Chemical

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Tajika Atsushi

Shin-Etsu Chemical

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Inazuki Yukio

Shin-Etsu Chemical

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Itoh Masamitsu

Shin-Etsu Chemical

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Kaneko Hideo

Shin-Etsu Chemical

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Moriya Jiro

Shin-Etsu Chemical

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Okazaki Satoshi

Shin-Etsu Chemical

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