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Inazuki Yukio

Shin-Etsu Chemical

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Publication

Featured researches published by Inazuki Yukio.

Archive | 2004

Photomask blank and methods of manufacturing photomask

Kaneko Hideo; Inazuki Yukio; Tsukamoto Tetsushi; Mogi Masayuki; Okumura Katsuya

Archive | 2003

Phase shift mask blank and manufacturing method thereof

Kaneko Hideo; Inazuki Yukio; Tsukamoto Tetsushi; Okazaki Satoshi

Archive | 2012

Binary photomask blank and process for producing binary photomask

Yoshikawa Hiroki; Inazuki Yukio; Nishikawa Kazuhiro; Kaneko Hideo

Archive | 2003

Phase shift mask blank, phase shift mask, and methods of manufacturing the same

Watanabe Masataka; Inazuki Yukio; Kaneko Hideo; Kojima Mikio; Okazaki Satoshi

Archive | 2003

Phase shift mask blank, phase shift mask, and manufacturing method thereof

Inazuki Yukio; Nakatsu Masayuki; Numanami Tsuneo; Tajika Atsushi; Kaneko Hideo

Archive | 2002

Phase shift mask blank substrate, phase shift mask, and method of manufacturing the same

Inazuki Yukio; Kaneko Hideo; Maruyama Tamotsu; Okazaki Satoshi

Archive | 2018

METHOD FOR PREPARING HALFTONE PHASE SHIFT MASK BLANK, HALFTONE PHASE SHIFT MASK BLANK, HALFTONE PHASE SHIFT MASK, AND THIN FILM FORMING APPARATUS

Inazuki Yukio

Archive | 2017

PHOTOMASK BLANK AND METHOD FOR PREPARING A PHOTOMASK

Kosaka Takuro; Inazuki Yukio; Kaneko Hideo

Archive | 2017

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD FOR USING IN A PHOTOMASK-RELATED SUBSTRATE

Numanami Tsuneo; Inazuki Yukio; Sakurada Toyohisa

Archive | 2017

Photomask blank manufacturing method

Yoshikawa Hiroki; Fukaya Souichi; Inazuki Yukio; Nakagawa Hideo

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Collaboration

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Kaneko Hideo

Shin-Etsu Chemical

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Okazaki Satoshi

Shin-Etsu Chemical

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Yoshikawa Hiroki

Shin-Etsu Chemical

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Fukushima Yuichi

Shin-Etsu Chemical

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Haraguchi Takashi

Shin-Etsu Chemical

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Maruyama Tamotsu

Shin-Etsu Chemical

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Numanami Tsuneo

Shin-Etsu Chemical

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Saga Tadashi

Shin-Etsu Chemical

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Nakatsu Masayuki

Shin-Etsu Chemical

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Tajika Atsushi

Shin-Etsu Chemical

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