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Kaneko Hideo

Shin-Etsu Chemical

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Publication

Featured researches published by Kaneko Hideo.

Archive | 2000

Blanks for photomask and photomask

Kaneko Hideo; Inazuki Sadaomi; Okazaki Satoshi

Archive | 2004

PHASE SHIFT MASK BLANK AND PHASE SHIFT PHOTOMASK

Tsukamoto Tetsushi; Yoshikawa Hiroki; Kaneko Hideo; Inazuki Sadaomi; Okazaki Satoshi

Archive | 2007

LEVENSON TYPE PHASE SHIFT MASK AND METHOD FOR MANUFACTURING SAME

Kojima Yosuke; Chiba Kazuaki; Haraguchi Takashi; Yoshikawa Hiroki; Inazuki Sadaomi; Kaneko Hideo; Okazaki Satoshi

Archive | 2004

METHOD FOR MANUFACTURING PHASE SHIFT MASK BLANK AND METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND PHASE SHIFT MASK BLANK AND PHASE SHIFT MASK

Inazuki Sadaomi; Yoshikawa Hiroki; Kaneko Hideo; Okazaki Satoshi

Archive | 2003

SPUTTERING TARGET AND METHOD FOR PRODUCING PHASE SHIFTING MASK BLANK, AND PHASE SHIFTING MASK USING THE SAME

Tsukamoto Tetsushi; Shinagawa Tsutomu; Inazuki Sadaomi; Kaneko Hideo; Watanabe Masataka; Okazaki Satoshi

Archive | 2005

PHOTOMASK BLANK AND METHOD FOR CONTROLLING REFLECTANCE OF PHOTOMASK BLANK

Kaneko Hideo; Takano Shinichi

Archive | 2003

SPUTTERING TARGET, PHASE SHIFT MASK BLANK USING THIS SPUTTERING TARGET, AND METHOD OF MANUFACTURING PHASE SHIFT MASK

Shinagawa Tsutomu; Okazaki Satoshi; Inazuki Sadaomi; Kaneko Hideo; Watanabe Masataka

Archive | 2010

PHOTOMASK BLANK, METHOD FOR PROCESSING THE SAME, AND ETCHING METHOD

Watanabe Satoshi; Kaneko Hideo; Koitabashi Ryuji; Igarashi Shinichi; Kawai Yoshio; Shirai Shozo

Archive | 2004

PHOTOMASK BLANK, PHOTOMASK AND METHOD OF SELECTING PHOTOMASK BLANK

Tsukamoto Tetsushi; Kaneko Hideo; Maruyama Tamotsu; Inazuki Sadaomi

Archive | 2003

SPUTTERING TARGET, PHASE SHIFT MASK BLANK OBTAINED BY USING THE SAME SPUTTERING TARGET AND METHOD OF PRODUCING PHASE SHIFT MASK

Shinagawa Tsutomu; Okazaki Satoshi; Kaneko Hideo; Inazuki Sadaomi

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Collaboration

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Okazaki Satoshi

Shin-Etsu Chemical

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Inazuki Yukio

Shin-Etsu Chemical

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Maruyama Tamotsu

Shin-Etsu Chemical

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Yoshikawa Hiroki

Shin-Etsu Chemical

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Watanabe Masataka

Shin-Etsu Chemical

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Masunaga Keiichi

Shin-Etsu Chemical

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Haraguchi Takashi

Shin-Etsu Chemical

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Kojima Mikio

Shin-Etsu Chemical

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Nakatsu Masayuki

Shin-Etsu Chemical

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Numanami Tsuneo

Shin-Etsu Chemical

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