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Okazaki Satoshi

Shin-Etsu Chemical

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Publication

Featured researches published by Okazaki Satoshi.

Archive | 2000

Blanks for photomask and photomask

Kaneko Hideo; Inazuki Sadaomi; Okazaki Satoshi

Archive | 2004

PHASE SHIFT MASK BLANK AND PHASE SHIFT PHOTOMASK

Tsukamoto Tetsushi; Yoshikawa Hiroki; Kaneko Hideo; Inazuki Sadaomi; Okazaki Satoshi

Archive | 1996

POSITIVE RESIST COMPOSITION FOR LIFT-OFF METHOD AND PATTERN FORMING METHOD

Okazaki Satoshi; Nishikawa Kazuhiro; Kobayashi Masaru; Kobayashi Yoshitaka; Umemura Mitsuo; Ishihara Toshinobu

Archive | 2002

PHASE SHIFT MASK BLANK, PHASE SHIFT MASK AND METHOD FOR PRODUCING PHASE SHIFT MASK

Okazaki Satoshi; Kaneko Ichiro; Moriya Jiro; Suzuki Masayuki; Maruyama Tamotsu

Archive | 2007

LEVENSON TYPE PHASE SHIFT MASK AND METHOD FOR MANUFACTURING SAME

Kojima Yosuke; Chiba Kazuaki; Haraguchi Takashi; Yoshikawa Hiroki; Inazuki Sadaomi; Kaneko Hideo; Okazaki Satoshi

Archive | 2004

METHOD FOR MANUFACTURING PHASE SHIFT MASK BLANK AND METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND PHASE SHIFT MASK BLANK AND PHASE SHIFT MASK

Inazuki Sadaomi; Yoshikawa Hiroki; Kaneko Hideo; Okazaki Satoshi

Archive | 2003

SPUTTERING TARGET AND METHOD FOR PRODUCING PHASE SHIFTING MASK BLANK, AND PHASE SHIFTING MASK USING THE SAME

Tsukamoto Tetsushi; Shinagawa Tsutomu; Inazuki Sadaomi; Kaneko Hideo; Watanabe Masataka; Okazaki Satoshi

Archive | 1997

WATER-SOLUBLE PATTERN FORMING MATERIAL

Hatakeyama Jun; Watanabe Satoshi; Ishihara Toshinobu; Okazaki Satoshi; Umemura Mitsuo

Archive | 2005

PHASE SHIFT MASK BLANK, PHASE SHIFT MASK AND METHOD FOR TRANSFERRING PATTERN

Yoshikawa Hiroki; Ishihara Toshinobu; Okazaki Satoshi; Inazuki Sadaomi; Saga Tadashi; Okada Kimihiro; Iwakata Masahide; Haraguchi Takashi; Fukushima Yuichi

Archive | 2003

SPUTTERING TARGET, PHASE SHIFT MASK BLANK USING THIS SPUTTERING TARGET, AND METHOD OF MANUFACTURING PHASE SHIFT MASK

Shinagawa Tsutomu; Okazaki Satoshi; Inazuki Sadaomi; Kaneko Hideo; Watanabe Masataka

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Collaboration

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Kaneko Hideo

Shin-Etsu Chemical

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Maruyama Tamotsu

Shin-Etsu Chemical

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Inazuki Yukio

Shin-Etsu Chemical

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Yoshikawa Hiroki

Shin-Etsu Chemical

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Watanabe Masataka

Shin-Etsu Chemical

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Ishihara Toshinobu

Shin-Etsu Chemical

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Haraguchi Takashi

Shin-Etsu Chemical

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Moriya Jiro

Shin-Etsu Chemical

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Fukushima Yuichi

Shin-Etsu Chemical

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Saga Tadashi

Shin-Etsu Chemical

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